Annular sputtering targets for Quorum /Thermo VG / Bio-rad / Polaron sputter coaters (82mm ID)
High purity EM-Tec annular sputter targets with an outside diameter of 82 mm (62mm internal diameter) are supplied mounted on an aluminium holder. They are compatible with the discontinued Quorum SC7640 cool sputter coater and predecessor models and brands with 82mm annular targets. These including coaters from Polaron, Bio-rad, Fisons, Thermo VG and Emitech sputter coaters. Models include: E5100, SC510, SC515, SC7640 and SC7680. Please note that the SC7640 is a rotary pumped coater and is designed to sputter non-oxidising (noble) metals, such as gold, platinum and gold/palladium and cannot sputter oxidising metals, such as Cr, Al, ITO, W etc. Oxidising metals require a high vacuuum (turbo pumped) sputter coater. See: Safematic CCU-010 HV.
Targets are relatively expensive due to the high purity of the precious metals which require multiple refining steps. A purity of 99.99% or close is desired to avoid any artefacts either in imaging or with EDX analysis.
Whilst we offer very competitive pricing on all sputtering targets, our prices will vary from time to time due to fluctuations of the market prices of metals. For this reason we do not display prices online but kindly ask that you contact us for a quotation.
Gold/Palladium Target, diam.82 x diam.60 x 0.1mm Annular on Support Ring, Au/Pd 80/20, 99.99% Au/Pd (each)