Kleindiek in-situ AFM
3D information from simultaneous SEM and AFM images
notably compact and load-lock compatible
easy specimen and tip exchange without laser adjustment
can be used in combination with micromanipulators and other in-situ and ex-situ tools
extremely stable operation and virtually insusceptible to vibrations
The innovative SuperFlat in-situ AFM combines the power of SEM and AFM in one instrument. Investigation of lateral dimensions and material from in-situ inspection with SEM can be complemented by precise AFM topographical and frictional information. The effortless availability of these two sets of data is unique to such a system and opens new avenues of investigation and nanoscale characterisation saving time moving the specimen between instruments.
The most amazing feature of the SuperFlat AFM is its size. The tool is flat and compact enough to fit through the majority of SEM load-locks, allowing ease of use and increasing throughput. In addition, its size offers enormous stability and vibration dampening advantages, which are particularly attractive when using the tool ex-situ.
SuperFlat in-situ AFM enables full SEM functionality for precision placement of the AFM probe tip on your specimen. The SuperFlat compact design lets you use your standard SEM including specimen stage and accessories, such as EDX energy-dispersive x-ray spectroscopy during AFM operation.
The design ensures easy handling and tip exchange. A specimen or tip exchange takes only a minute and a tedious laser adjustment process is not required.
- Works in air and in SEM
- Intuitive control interfaces and software
- Reliable operation (one year endurance test)
- Total system height: 10 mm
- Total system width: 100 mm
- Weight: 100 g + SEM/FIB dovetail
A = left / right B = up / down C = in / out
- The ultra-flat three-axis manipulator with unmatched stability and precision
- Operating range: A = 10 mm, B = 90°, C = 5 mm
- Resolution: A = < 0.5 nm, B = 5 nm, C = < 0.5 nm
- Scan range: X and Y = 14 μm, Z = 4 μm
- Resolution: 0.5 nm
- Load: 30 g
- Lift: 15 g
- Maximum sample size: 15 mm — 15 mm — 1 mm
- Operates in contact mode and dynamic mode
- Length: 400 µm
- Width: 50 µm
- Height: 4 to 5 µm
- Tip radius: < 20 nm
- Tip height: > 5 µm
- Tip force constant (calculation): 2 to 4 N/m
- Maximum tip force: 80 μN¹
- Resistance: 500 to 650 Ω
- Sensitivity: 3.1 x 10-3 mV/nm at Vbridge = 2.5 V²
¹ Calculated with assumptive deflection of 10% and the lowest force constant.
² Dependent on the bias voltage (Vbridge) that is applied to the series resistance of sensor and reference.
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.