Kleindiek LT-12830 linear table
Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.
The LT12830 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.
It is built specifically for lithography, cell counting, nanoprobing, and failure analysis applications and one version includes two positional encoders per axis for automatic yaw error compensation.
Optional software for three-point alignment is available.
- Length: 128 mm
- Width: 128 mm
- Height: 16 mm
- Weight: 520 g
- Travel X and Y: 28.5 mm
- Speed: up to 2 mm/s
- Resolution: < 0.5 nm
- Repeatability: 50 nm
- Angular deviation: < 1 µrad
- Load: 500 g
- Temperature range: 273 K to 353 K
UHV version: 273 K to 393 K
- Lowest pressure: 10-7 mbar
UHV version: 2 x 10-10 mbar
- Substage mounting: 4 x 3.2 mm holes
- Sample mounting: Clip or 2 x M3 holes
- Material: Stainless steel
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.