Software 32 bit with all available MeX modules:- MeX-Database, MeX-3DViewer, MeX-Creator, MeX-AutoCalibration, MeX-Profile, MeX-Area, MeX-Volume, MeX-StereoComparator, MeX-3DReader, MeX-Real3DMeasurement, MeX-Real3DFusion, MeX-ImageAnalysis, MeX-3DEditor, MeX-Automation, MeX-StillCreator, inclusive two years of e-mail support and free updates.
MeX - 3D measurement software for SEM
MeX is an easy to use stand-alone software package that turns any SEM with digital imaging into a true 3D surface measurement device. It uses stereoscopic images to automatically retrieve 3D information and generate a highly accurate, robust and dense 3D dataset - irrespective of the SEM magnification which is then used to perform traceable metrology measurements.
MeX analysis modules allow measurement of profile, roughness, area, volume and “Z” height plus more. All measurements are traceable, can be calibrated and conform to ISO standards. The performance of MeX has been proven by many users in leading universities and industry throughout the world, providing imaging and analysis previously unobtainable from SEM images.
The principles of 3D measurement using MeX
Conventional approaches in 3D measurement rely on the use of two images. This has a major drawback whereby the overall accuracy of the 3D measurement is partly dependent on an accurate reading of the tilt angle. This can be error-prone using conventional readings and only achieved to a limited level of accuracy.
MeX extends the stereoscopic approach by utilising a third image to enable user defined parameters, such as the tilt angle, to be automatically calculated. The influence of the user is therefore eliminated, allowing for the first time, traceable 3D measurements to be made in the SEM.
At the heart of MeX is it's innovative 3D reconstruction algorithms used to generate highly accurate, dense and robust 3D datasets. The performance of MeX becomes obvious in images of complex structures with steep edges and drop offs, as well as demanding samples with low texture and signal-to-noise-ratio. This high quality is achieved irrespective of image magnification.
3D measurement to international standards
The uniqueness of MeX is in its accuracy and robustness, enabling measurements and analysis to be performed to international standards. Roughness and area analysis are provided to EN/ISO standards with measurements performed directly on the SEM image. Printing and exporting the actual representations of an image is a one-click operation. The visual link between the surface and the image enable precise and flexible measurements and even volumetric analysis is conveniently feasible. Therefore MeX is the only software package that turns an SEM into a true 3D metrology measurement tool.
Image formation in the SEM is based on perspective projection. Similar to a conventional light microscope, a three dimensional object is projected onto a two dimensional image plane with information about the third dimension being lost. Although the large depth of focus in an SEM provides full depth of focus images it does not allow measurement of depth with only two dimensional measurements possible in the image plane.
A stereoscopic image is generated by eucentric tilting of the SEM stage (where the intersection of the primary electron beam with the specimen define the centre of tilting) to yield a second image of the specimen observed from a different viewpoint. Traditional overlay techniques such as red-green colouring provide anaglyph viewing and thus depth perception, but do not enable quantitative analysis. MeX automatically identifies points in each of the images that belong to the same point on the specimen. From these so-called homologous points the true three dimensional coordinates of the observed point can be recovered. MeX algorithms solve this demanding task for each pixel in each of the images to generate a dense 3D model of the specimen. Ideally an additional third image captured from a third tilt position allows calibration data to automatically be refined giving traceable results.
Easy installation, setup and operation
MeX software is self-installing and is extremely easy to use and works independently of any third party drivers or components. Available as 32 and 64 bit versions, no additional hardware is needed to run MeX as a standalone solution and it can be used with any SEM that produces images in common formats. Data is obtained quickly and effectively and the user interface of the overall package is user-friendly and self-explanatory. A wizard guides the user through the reconstruction process which then automatically converts the information to a 3D data set. The subsequent analysis is intuitive without the burden of unnecessary functionality.
For an overview of the measurement modules supplied with MeX 6.1 click here
Software 64 bit with all available MeX modules:- MeX-Database, MeX-3DViewer, MeX-Creator, MeX-AutoCalibration, MeX-Profile, MeX-Area, MeX-Volume, MeX-StereoComparator, MeX-3DReader, MeX-Real3DMeasurement, MeX-Real3DFusion, MeX-ImageAnalysis, MeX-3DEditor, MeX-Automation, MeX-StillCreator, inclusive two years of e-mail support and free updates.