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Special offer - Delivery now £4.99 when ordered online

  1. SEM/FIB
  2. Sputter coating
  3. Safematic CCU-010 LV standard vacuum sputter coater

Safematic CCU-010 LV standard vacuum sputter coater

Downloads

PDF icon CCU-010 Brochure.pdf
PDF icon Guide to selecting a coater and sputtering targets.pdf

Introduction

The Safematic CCU-010 LV is a standard vacuum (rotary pumped) coater primarily designed for SEM sputtering and thin film applications using non-oxidising metals, such as gold and platinum. Note that for W-SEM and FE-SEM applications the high vacuum CCU-010 HV is recommend.
A unique feature is a compact, self-contained sputtering head module which ensure optimum ease of use and servicing. The CCU-010 LV comes as standard with a useful dual-position film thickness monitor (FTM) measurement.
The glass vacuum chamber is 120mm in diameter and includes a handy vertical graduated scale to help set the height of the specimen stage. An implosion guard with safety monitoring is also fitted. There are specimen stage options to suit most applications and and extensive range of other options - including sputtering targets and upgrades to high vacuum and to carbon evaporation.


CCU-010 LV sputter/carbon coater highlights

  • Fully automatic sputter coating for SEM
  • Plug-and-go, self-contained sputtering module - easy upgrade to carbon evaporation
  • Routine, high quality sputtering of non-oxidising metals
  • Dual location film thickness measurement as standard
  • Intuitive, touch screen control - rapid data input, simple operation

Compact, plug-in sputter coating module

The SP-010 compact sputtering module conveniently includes all the features required for high quality sputter coating - including magnetron, target, shutter, process pressure regulator, power electronics and cooling system. The CCU-010 LV plus SP-010 sputtering module is designed for applications using non-oxidising metals (e.g. Au, Au/Pd, Pt etc.). For some thin film applications where extended sputtering times are required the SP-010 sputtering module has built-in cooling, which allows continuous coating runs of up to 50 minutes without the requirement of time consuming rest periods. There is also a high sputtering rate module (SP-011) available - useful for some non-EM applications. Note that for sputtering oxidising metals the CCU-010 HV high vacuum coater is required (see: CCU-010 HV).


Dual-position film thickness monitor as standard

A dual-position film thickness monitor (FTM) measurement system is fitted as standard on the CCU-010 LV specimen stage. Conveniently positioned in the same plane as the specimens this plug-in monitoring crystal can be moved between the centre of the stage and the outside, depending on specimen size.


Vacuum pumping requirements

The CCU-010 LV requires a "backing" rotary vacuum pump. With high performance, reliability and low noise characteristics, the Pfeiffer Pascal 2005 SD is ideally suited for this purpose. For further information see: Pfeiffer Pascal 2005 SD.


High vacuum upgrade - future proving your investment

If in the future you wish to upgrade the CCU-010 LV to high vacuum CCU-010 HV specification, then this is possible using one of two upgrade kits (see: Details below for ordering information).

 


Specimen stages

The CCU-010 LV includes a static, but height and tilt angle adjustable, plug-in style 80mm diameter specimen stage. For specimens requiring rotation the optional RS-010 rotary stage is recommended. For specimens with very irregular surfaces, particulates and spheres, the PS-010 rotary planetary stage is available.


ET-010 plasma cleaning accessory

The ET-010 plasma cleaning accessory is a fully integrated option for the Safematic CCU-010 sputter/carbon coater that is designed for the pre-treatment or post-treatment of specimens in combination with a coating process. SEM specimens can be pre-cleaned to remove light surface contamination prior to coating, without the need to breaking vacuum between cleaning and sputtering processes. Additionally,TEM carbon films can be converted from hydrophobic to hydrophilic using an air plasma.

Click here for detailed information: ET-010 plasma cleaning accessory


Coating LAB option

Offers easy access to coating and process data. The Windows software allows access to important data including pressure, current, voltage, coating rate, coating thickness and specimen temperature as real-time curves. The coater is connected to a PC using an integrated USB interface, whilst the Coating LAB automatically establishes a connection to the coater. Password protected tools for configuring the system and updating the firmware are included. For further information see: Coating LAB.


HS-010 head module vacuum storage box

The HS-010 is a compact vacuum storage box which allows a second CCU-010 coating head for the CCU-010 module, additional planetary or rotary stage and the full range of sputtering targets and carbon thread clean and under vacuum when not in use.

For further information please see: HS-010 vacuum storage box.


Choosing a coater configuration and sputtering targets...

Need help selecting a coater, options and sputtering targets to suit your requirements? Then please see: coater selection guide.


Learn more about the unique carbon sputtering and carbon modules...

SP-010 sputtering module

CT-010 carbon evaporation module

Put us to the test 

<a class="btn-orange" href="/demo-request-em?product_url=https://www.labtech.com/em/safematic-ccu-010-lv-standard-vacuum-sputter-..." _blank"="" data-cke-saved-href="/demo-request-em?product_url=https://www.labtech.com/em/safematic-ccu-010-lv-standard-vacuum-sputter-...">Request a demonstration


Ordering information 

CCU-010 base unit

100000
CCU-010 standard vacuum coater
+Add to Quote
P.O.A.

The Safematic CCU-010 LV standard vacuum coater is suitable for SEM  sputter coating with non-oxidising (noble) metals and carbon coating applications. Requires coating module/modules and rotary pump.


CCU-010 sputtering module and etch options

100002
SP-010 sputtering head module
+Add to Quote
P.O.A.

Advanced, plug-in sputtering head module with built-in cooling for optimum performance (for very fast sputtering rates see: 100012)

100012
SP-011 sputtering head module
+Add to Quote
P.O.A.

For applications requiring very fast sputtering rates

100013
ET-010 plasma cleaning accessory
+Add to Quote
P.O.A.

Plasma cleaning accessory for the Safematic CCU-010 sputter/carbon coater for the pre-treatment or after-treatment of specimens in combination with a coating process


CCU-010 specimen stages

100005
RS-010 rotary specimen table
+Add to Quote
P.O.A.

Height and angle adjustable 80mm diameter specimen stage with variable rotation.

100006
PS-010 rotary planetary specimen table
+Add to Quote
P.O.A.

Rotary planetary motion with variable speed and an 80mm diameter specimen platform. Plug-in style.


CCU-010 Coating LAB and vacuum storage

100008
Coating LAB
+Add to Quote
P.O.A.

Window-based software offering easy access to coating and process data: pressure, current, voltage, coating rate, coating thickness and specimen temperature

100014
HS-010 vacuum storage box for CCU-010 accessories
+Add to Quote
P.O.A.

A compact vacuum storage system for CCU-010 head modules and other accessories. Can be pumped by the coater or separate rotary pump (not supplied)



Pumping options

A73501983
Edwards nXDS6i dry scroll pump
+Add to Quote
P.O.A.

Edwards nXDS6i dry scroll vacuum pump. Peak pumping speed: 6.2 m3h-1 ​. Suitable for applications where oil-based rotary pumps need to be avoided. 

A65201903
Edwards RV3 rotary vacuum pump (each)
+Add to Quote
P.O.A.

Pumping speed: 3.3 m3h-1 (50hz). The RV3 oil-sealed rotary vane pumps delivers excellent ultimate vacuum pressure, high pumping speeds and superior vapour handling capabilities with quiet operation. Requires an EMF10 mist filter (A4622600)

A4622600
Edwards EMF10 mist filter (each)
+Add to Quote
P.O.A.

The Edwards EMF10 filter captures oil mist from the outlet of pumps, which would otherwise be ejected into the atmosphere. The EMF10 mist filter is suitable for use with Edward RV3, RV5 and RV8 vacuum pumps. They are very efficient at 99.999% DOP test and are also azide proof. Supplied with a NW25 clamp, centering ring and ‘O’ ring, NW25 to 3/4 inch BSP adaptor.


Sputtering targets - please select your preferred metal/metals.

Note: oxidising metals can only be sputtered with a high vacuum coater, see: CCU-010 HV

Gold sputter targets

300000
Gold (Au) sputtering target, dia. 54 x 1.0mm disc, 99.99%
+Add to Quote
P.O.A.

Gold sputter coater target Ø 54 x 1.0mm thick, purity 99.99%, Au

300017
Sputter target gold (Au) Ø 54 x 0.2mm purity 99.99%
+Add to Quote
P.O.A.

Sputtering target, gold (Au) Ø 54 x 0.2mm purity 99.99% (each)

70-AU5404
Gold sputtering target, dia.54 x 0.1mm disc, 99.99% Au
+Add to Quote
P.O.A.

Gold sputter coater target, Ø54 x 0.1mm disc, 99.99% Au

70-AU5412
Gold sputter coater target, dia.54 x 0.3mm, disc, 99.99% Au
+Add to Quote
P.O.A.

Gold sputtering target, dia.54 x 0.3mm, disc, 99.99% Au (each)

70-AU5416
Gold sputter coater target, dia.54 x 0.4mm, disc, 99.99% Au
+Add to Quote
P.O.A.

Gold sputtering target, dia.54 x 0.4mm, disc, 99.99% Au (each)


Gold palladium sputter targets

300001
Sputter target gold palladium 80/20 (Au/Pd) Ø 54 x 1.0mm purity 99.99%
+Add to Quote
P.O.A.
Palladium sputtering target

Sputtering target, gold/palladium 80/20 (Au/Pd) Ø 54 x 1.0mm purity 99.99% (each)

300002
Sputter target gold palladium 70/30 (Au/Pd) Ø 54 x 1mm purity 99.99%
+Add to Quote
P.O.A.
Palladium sputtering target

Sputter target gold palladium 70/30 (Au/Pd) Ø 54 x 1 mm purity 99.99% (each)

300003
Sputter target gold/palladium 60/40 (Au/Pd) Ø 54 x 1.0 mm purity 99.99%
+Add to Quote
P.O.A.
Palladium sputtering target

Sputter target gold palladium 60/40 (Au/Pd) Ø 54 x 1.0 mm purity 99.99% (each)

70-AP5404
Gold/Palladium sputtering target, dia. 54 x 0.1mm disc, 60/40 Au/Pd, 99.99% Au/Pd
+Add to Quote
P.O.A.
Palladium sputtering target

Gold/Palladium sputter coater target, Ø54 x 0.1mm disc, 60/40 Au/Pd, 99.99% Au/Pd

70-AP5405
Gold/Palladium sputtering target, dia. 54 x 0.1mm disc, 80/20 Au/Pd, 99.99% Au/Pd
+Add to Quote
P.O.A.
Palladium sputtering target

Gold/Palladium sputter coater target, Ø54 x 0.1mm disc, 80/20 Au/Pd, 99.99% Au/Pd

70-AP5408
Gold/Palladium sputtering target, dia. 54 x 0.2mm disc, 60/40 Au/Pd
+Add to Quote
P.O.A.
Palladium sputtering target

Gold/Palladium coater target, Ø54 x 0.2mm disc, 60/40 Au/Pd, 99.99% Au/Pd

70-AP5409
Gold/Palladium sputtering target, dia. 54 x 0.2mm disc, 80/20 Au/Pd, 99.99% Au/Pd
+Add to Quote
P.O.A.
Palladium sputtering target

Gold/Palladium sputter coater target, Ø54 x 0.2mm disc, 80/20 Au/Pd, 99.99% Au/Pd


Platinum sputter targets

300004
Sputter target platinum (Pt) dia. 54 x 0.2 mm purity 99.95%
+Add to Quote
P.O.A.

Sputtering target, platinum (Pt) Ø 54 x 0.2mm purity 99.95%​ (each)

70-PT5404
Platinum sputtering target, dia. 54 x 0.1mm disc, 99.99% Pt
+Add to Quote
P.O.A.
Palladium sputtering target

Platinum coater target, Ø54 x 0.1mm disc, 99.99% Pt


Other sputter targets

300005
Sputter target silver (Ag) Ø 54 x 1.0mm purity 99.99%
+Add to Quote
P.O.A.

Sputtering target, silver (Ag) Ø 54 x 1 mm purity 99.99% (each)

300011
Sputter target Iron (Fe) Ø 54 x 0.35mm purity 99.9%
+Add to Quote
P.O.A.

Sputtering target, Iron (Fe) Ø 54 x 0.35mm purity 99.9% (each)

300013
Sputter target copper (Cu) Ø 54 x 1.0mm purity 99.99%
+Add to Quote
P.O.A.

Sputter target, copper (Cu) Ø 54 x 1.0mm purity 99.99% (each)

300019
Sputter target platinum/iridium (Pt/Ir) Ø 54 x 1 mm purity 99.95%
+Add to Quote
P.O.A.

Sputtering target, platinum/iridium (Pt/Ir) Ø 54 x 1.0mm purity 99.95% (each)

300021
Sputter target platinum/palladium (Pt/Pd) Ø 54 x 0.5 mm purity 99.95%
+Add to Quote
P.O.A.

Sputtering target platinum/palladium (Pt/Pd) Ø 54 x 0.5mm purity 99.95% (each)

70-PD5404
Palladium sputtering target, dia. 54 x 0.1mm disc, 99.99% Pd
+Add to Quote
P.O.A.

Palladium sputter coater target, Ø54 x 0.1mm disc, 99.99% Pd

Back to vacuum coater home page

Details

CCU-010 LV ordering information

Code Product description
100001 CCU-010 LV. Compact coating system base unit. Low vacuum. External rotary pump (200002) or scroll pump required
Rotary vacuum pump
200002 Pfeiffer Pascal 2005 SD 5 m3/hr rotary pump with oil mist filter
TBA Dry scroll pump 10 m3/hr (oil-free)
 
Options for coating and glow discharge
100002 SP-010. Sputtering head module
100012 SP-011. Sputtering head module for high sputtering rates
100003 CT-010. Carbon fibre cord evaporation head module, featuring a carbon spooling system for up to 50 depositions
100004 Glow discharge for hydrophobic/hydrophilic treatment of carbon films
 
Specimen stage options. The CCU-010 LV is fitted as standard with static specimen stage, with adjustment for height and tilt but no rotation
100005 RS-010 rotation stage (variable rotation speed)
100006 PS-010 rotary planetary stage (varible rotation speed)
400020 Additional 80mm Ø standard specimen platform
 
Other options
100008 Coating LAB software
200000 HV Upgrade Kit I. Includes Pfeiffer turbopump (Hi Pace 80), conversion kit and cable
200001 HV upgrade Kit II. Includes Pfeiffer turbopump (Hi Pace 80), Vacuubrand MD 1 VARIO-SP membrane pump, conversion kit and cable
 
Sputtering targets
300000 Sputter target gold (Au) 54 Ø x 1.0mm. Purity 99.99%
300017 Sputter target gold (Au) 54 Ø x 0.2mm. Purity 99.99%
300001 Sputter target gold/palladium (Au/Pd), 80/20, 54mm Ø x 1.0mm. Purity 99.99%
300002 Sputter target gold/palladium (Au/Pd), 70/30, 54mm Ø x 1.0mm. Purity 99.99%
300003 Sputter target gold/palladium (Au/Pd), 60/40, 54mm Ø x 1.0mm. Purity 99.99%
300004 Sputter target platinum (Pt), 54mm Ø x 0.2mm. Purity 99.95%
300005 Sputter target silver (Ag), 54mm Ø x 1.0mm. Purity 99.99%
300007 Sputter target nickel (Ni), 54mm Ø x 3.5mm. Purity 99.99%
300011 Sputter target iron (Fe), 54mm Ø x 3.5mm. Purity 99.99%
300013 Sputter target copper (Cu), 54mm Ø x 1.0mm. Purity 99.99%
300019 Sputter target platinum/Iridium (Pt/Ir), 54mm Ø x 1.0. Purity 99.95%
300020 Sputter target iridium (Ir), 54mm Ø x 1.0mm. Purity 99.95%
300021 Sputter target platinum/palladium (Pt/Pd), 54mm Ø x 0.5mm. Purity 99.99%
 
Carbon fibre cord
300014 Carbon fibre cord on spool (holder), 1m
300015 Carbon fibre cord on spool (holder), 2m
 
Spare FTM quartz crystals
300016 Spare FTM piezoelectric quartz crystals, gold coated. Pack of 10

Specifications

CCU-010 LV


Dimensions (unpacked):          L 570 x W 360 x H 350mm. 25kg
Glass cylinder:                         Ø 120mm (DN 100 ISO-KF compatible)
Implosion guard:                      Plastic splinter shield around the glass cylinder
Targets:                                   Ø 54mm and thickness up to 3mm
Coating time:                           0.5 to 990s
Coating current                       10-100mA 
Pumping:                                 External rotary vacuum pump (option)
Ultimate vacuum:                    < 5 x 10-3 mbar (with Pfeiffer Pascal 2005 SD rotary vacuum pump)
Vacuum measurement:           Pirani measuring gauge (measuring range up to 1e-3 mbar) Pirani and cold cathode measuring system
Display:                                   115 x 86mm, TFT graphical display
Specimen stage:                     Ø 80mm, height adjustment 0-50mm, tilt 0-45°
Film thickness measurement: Dual-position film thickness monitoring system. Piezoelectric crystal: frequency 6MHz, Ø 14mm, thickness 0.4mm.
Electrical:                                Plug C14, 90-260VAC, 47-63 Hz, 500W 
Process gas connections:       Process gas: Ø 6mm, venting gas: Ø 6mm, plasma gas: Ø 6mm
Rotary pump connections:      Flange connection DN 25 ISO-KF
Electrical:                                Connector socket C13, secured with 10A therm. circuit breaker

Safematic, sputter coater, sputter coating, CUU-010 LV, SEM coater, gold coater, SEM sputter coater,
 

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