STFMA SpringTable and Force Measurement Analysis
The STFMA package is an ingenious and simple way of measuring forces in-situ in an SEM. The SpringTable relies on the microscope’s high resolution power to deliver force measurements quickly and easily. The specimen is mounted on an SEM stub and inserted into one end of the SpringTable. Data is then collected by deflecting the specimen and table, which has a well defined and known spring constant, by a given distance while recording images with the SEM. Each amount of deflection corresponds to a force. The Force Measurement Analysis software processes the image files, reading out the header info and detecting the deflection (both of the substrate and the sample) and convolutes this data to yield a force distance curve.
The SpringTable’s design and construction confine its motion to one dimension thereby avoiding any ambiguity in the results.
Using the Force Measurement Analysis software, the acquired imagery is batch processed, delivering results with just a few mouse-clicks, seconds after performing the experiment.
- Tensile testing
- MEMS analysis
..Maximum force: 50 mN
..Minimum force: 10 nN
..The Spring table’s dimensions depend on the desired force constant.
..The Spring table’s resolution depends on the SEM’s resolution (up to 1:1000).