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		<pubDate>Thu, 20 Oct 2022 08:25:27 +0000</pubDate>
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		<pubDate>Thu, 20 Oct 2022 08:25:27 +0000</pubDate>
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					<description><![CDATA[<p>SiN membrane 150nm over a 1.0mm square window on a 100um silicon frame</p>
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					<description><![CDATA[<p>SiN membrane 200nm over a 1.0mm square window on a 100um silicon frame</p>
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					<description><![CDATA[<p>SiN membrane 500nm over a 1.0mm square window on a 100um silicon frame</p>
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