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Tergeo plasma cleaner 75W

SKU: PIE-TG100

Tergeo plasma cleaner 75W including In-situ plasma source for immersion mode cleaning. Plasma sensor for quantitative plasma intensity measurement. 75W 13.56MHz high frequency RF supply with auto-matching.

Consisting of:

  • Thick-wall quartz tube (5mm thick) with inner diameter 110mm and outer diameter 120mm, depth 280mm
  • In-situ plasma source for immersion mode cleaning.
  • Plasma sensor for quantitative plasma intensity measurement
  • 75W 13.56MHz high frequency RF supply with auto-matching. Adjustable from 1 to 75W at 1W intervals
  • 7-inch resistive LCD industrial touchscreen controller
  • Fully automatic operation with 20 recipe support
  • Job sequence mode operation to execute three cleaning steps
  • Two mass flow controller (MFC) regulated gas inputs (supports up to three)
  • Mass flow controller (MFC) option upon request)
  • Pressure sensor
  • Venting/purging port with electronic solenoid valve (Swagelock 1/4″ compression fitting)
  • One pumping port with electronic shut-off valve and standard NW/KF25 vacuum port
  • Optional plasma pulsing – see: PIE-TG104

Vacuum pump required – see options