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XYZ substage for UHV with encoders on all axes
SKU: LT-6820XEYEZE-UHV-00
XYZ substage for UHV with encoders on all axes. Substage with 20mm travel and featuring integrated optical positional encoders. The system includes control electronics, joypad, PC software with a three-point alignment tool and an operator’s handbook. Vacuum flange and vacuum feedthrough(s) to be supplied by the customer.
£0.00