EM-CCU-safematic-largechamber

LC-006 large chamber for CCU-0010 coaters

The LC-006 is a large chamber option that replaces the standard glass chamber and allows specimens up to 6” (152mm) to be coated. The chamber is made of aluminium therefore does not require an implosion guard. The LC-006 includes a sample holder for 6” wafers, but other holders can be fitted.