EM-lt-substg-XYZR

Eucentric 5-axis substage

Substage with 10mm travel in X and Y, 3mm travel in Z, unlimited travel in rotation, mounted on a tilting platform. The tilting platform allows ±90° tilt and is equipped with an encoder with 0.2° resolution. The system includes control electronics, a joypad, PC software, a vacuum flange, a vacuum feedthrough and an operator’s handbook.