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Quartz crystals for FTMs

EM-Tec quartz crystals are particularly suited for thickness monitors (FTM), thickness controllers and quartz crystal microbalances (QCM) used with a range of vacuum instrumentation, including SEM sputter coaters and EM carbon evaporation systems.

EM-Tec quartz crystals are plano-convex, 14.0mm (0.55”) in diameter and are compatible with all thickness measurement, controller and QCM systems using 5MHz and 6MHz sensors. These are used on sputter coaters, carbon coaters and vacuum deposition systems from: Cressington/Agar, Bal-Tec, Denton, Emitech, Edwards, JEOL, Leica, Polaron/Bio-rad/Fisons/Thermo VG/Quorum and Safematic. Crystals are packaged in a flat pack carousel which contains ten QCM crystals.

EM-Tec quartz crystals are available with two types of coating for the electrodes:

  • Gold electrodes are standard and recommended for low film stress deposition materials such as gold, silver, palladium, gold/palladium, platinum/palladium and copper
  • Silver electrodes are recommended for high film stress deposition materials such as chromium, nickel, platinum, iridium and carbon

Part #

64-010855

64-010857

64-010851

64-010853

Frequency

6 MHz

5 Mhz

Shape

Plano-convex

Plano-convex

Substrate material

Quartz

Quartz

Electrode

Gold

Silver

Gold

Silver

Diameter

14mm / 0.55”

12.5mm / 0.49”

Thickness

0.27mm

0.27mm

Packaging / pack size

Carousel/10

Carousel/10

Application

Low stress films

High stress films

Low stress films

High stress films

Ordering information: