Prober shuttles PS4, PS8, PS12
Kleindiek Prober Shuttles are tools for high-precision in-situ electrical nanoprobing in an SEM. The ultra-flat three-axis MM4 manipulators have unmatched stability and precision when probing the latest nanoscale devices. Prober Shuttle models comprise either four, eight or twelve MM4s with the option of an ultra-flat two-axis or three-axis substage.
All this high precision is built into a shuttle where the total height of the system is only 10 mm, making it compatible with a wide range of SEM load-locks thus enhancing workflow and helping you to achieve a higher sample throughput.
All Prober Shuttles provide low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools (APT) hardware and software suite including Live Contact Tester (LCT) and Electron Beam Induced Current (EBIC) imaging modules.
The PS8 Prober Shuttle is the most compact and highly integrated nanoprobing system on the market. The new PS8e now adds positional encoders which enable faster and more efficient nanoprobing workflows.
The ability to automatically pre-align the probes is especially important for probing on the most recent technology nodes where beam sensitivity is an issue and thus, very low acceleration voltages are required. Using pre-defined alignment positions, all eight probes can be brought from their individual parked positions into close vicinity to each other at a consistent height above the sample – at the click of a button! This eliminates the tedious pre-alignment task which involved constant corrections of the astigmatism and/or necessitated switching to higher acceleration voltages.
The PS8e utilizes the MM4 ultra-flat three-axis manipulators that exhibit unmatched stability and precision. The entire height of the encoded system is 10 mm, retaining compatibility with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput.
Brochure downloads:
Download a copy of the 2020 IPFA paper entitled “Locating low-ohmic Variations in Resistance using Electron Beam Induced Voltage Imaging”   ipfa_2020_EBIV
- Small and practical
- Plug-and-play system with modular components
- Interfacing solutions for most SEM/FIB instruments (including load-lock compatibility)
- Fast setup and removal
- Pioneering cabling technology
Clear and simple
- Intuitive control interfaces and software
- User-friendly and easy to learn
- Quick and easy probe tip exchange
- Compact, stand-alone electronics
- Effortless work with multiple manipulators
Robust and stable
- Excellent stability
- Low drift (1 nm/min)
- Reliable operation (one year endurance test)
- Virtually insusceptible to vibrations
- Fast pre-positioning by hand
Fast and precise
- High operating velocity (up to 10 mm/sec)
- Sub-nanometer resolution (0.25 nm)
- No backlash or reversal play
- Extensive working range
- Coarse and fine displacement in one drive
MM-PS4
- Total height: 10 mm
- Total width: 100 mm
- Maximum sample size: 20 mm — 20 mm — 1 mm
- Weight: 100 g + SEM/FIB dovetail
Next generation micromanipulators
A = left / right    B = up / down    C = in / out
- Operating range: A = 10 mm, B = 90°, C = 5 mm
- Resolution: A = < 0.5 nm, B = 5 nm, C = < 0.5 nm
- Low drift: 1 nm/min
Low-capacity, low-current measurements
- Noise: 20 fA @ 1 Hz
- Insulation leakage current: <50 fA/V
- Signal conductor resistance: <5 Ω
- Maximum voltage: 100 V
- Maximum current: 100 mA
The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform. A low-current measurement kit is integrated into each manipulator. The system includes control electronics, a joypad, a vacuum flange, a vacuum feedthrough, sample probe needles and an operator’s handbook.
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
MM-PS8e
- Total height: 10 mm
- Total width: 140 mm
- Maximum sample size: 20 mm — 20 mm — 1 mm*
- Weight: 200 g + SEM/FIB dovetail
- Clean cable management from flange to rack
- Non-magnetic design
- Ready for 5 nm and beyond
Next generation micromanipulators
A = left / right    B = up / down    C = in / out
- Operating range: A = 5 mm, B = 90°, C = 5 mm
- Resolution: A < 0.05 nm, B < 0.5 nm, C < 0.05 nm
- Low drift: 1 nm/min
Encoder features
- Park & restore probes with a click of a button
- Drive substage to pre-defined locations
- Fast cycle time
Low-capacity, low-current measurements
- Noise: 25 fA @ 1 Hz
- Insulation leakage current: <50 fA/V
- Signal conductor resistance: <5 Ω
- Maximum voltage: 100 V
- Maximum current: 100 mA
The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform. A low-current measurement kit is integrated into each manipulator. The system includes control electronics, a joypad, a vacuum flange, a vacuum feedthrough, sample probe needles and an operator’s handbook.
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
*Larger sample sizes can be made possible through custom modifications.
The PS range of Kleindiek Prober Shuttles can be supplied in many different configurations. We would be happy to advise on the options and help configure the best specification for your application.
Ordering information:
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PS4 starter – prober shuttle with four probers
PS4 Starter – Prober Shuttle with Four Probers – An electrical characterisation system for electron microscopy. The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform. A low-current measurement kit is integrated into each manipulator. The system includes a single set of control electronics combined with a multiplexer- a joypad- a vacuum flange- a vacuum feedthrough- sample probe needles and an operator’s handbook.
Price On Request £0.00 Add to basket -
Prober shuttle with eight probers and three axis substage
An electrical characterisation system for electron microscopy. The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform with an integrated super-flat three axis substage. A low-current measurement kit is integrated into each manipulator. The system includes control electronics in a 19″ electronics rack, a joypad, a vacuum flange, a vacuum feedthrough, sample probe needles, iProbe control software and an operator’s handbook.
Price On Request £0.00 Add to basket -
PS4 pro – prober shuttle with four probers and substage
PS4 Pro – Prober Shuttle with Four Probers and three axis substage – An electrical characterisation system for electron microscopy. The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform with an integrated super-flat three axis substage. A low-current measurement kit is integrated into each manipulator. The system includes control electronics- a joypad- a vacuum flange- a vacuum feedthrough- sample probe needles and an operator’s handbook.
Price On Request £0.00 Add to basket -
PS4 base – prober shuttle with four probers
PS4 Base – Prober Shuttle with Four Probers – An electrical characterisation system for electron microscopy. The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform. A low-current measurement kit is integrated into each manipulator. The system includes control electronics- a joypad- a vacuum flange- a vacuum feedthrough- sample probe needles and an operator’s handbook.
Price On Request £0.00 Add to basket -
Prober shuttle with two probers and three axis substage (upgradeable to four probes)
An electrical characterisation system for electron microscopy. The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform with an integrated super-flat three axis substage. A low-current measurement kit is integrated into each manipulator. The system includes control electronics, a joypad, a vacuum flange, a vacuum feedthrough, sample probe needles and an operator’s handbook.
Price On Request £0.00 Add to basket -
Prober shuttle with two probers (upgradeable to four probes)
An electrical characterisation system for electron microscopy. The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform. A low-current measurement kit is integrated into each manipulator. The system includes control electronics, a joypad, a vacuum flange, a vacuum feedthrough, sample probe needles and an operator’s handbook.
Price On Request £0.00 Add to basket