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Prober shuttles PS4, PS8, PS12

Kleindiek Prober Shuttles are tools for high-precision in-situ electrical nanoprobing in an SEM. The ultra-flat three-axis MM4 manipulators have unmatched stability and precision when probing the latest nanoscale devices. Prober Shuttle models comprise either four, eight or twelve MM4s with the option of an ultra-flat two-axis or three-axis substage.

All this high precision is built into a shuttle where the total height of the system is only 10 mm, making it compatible with a wide range of SEM load-locks thus enhancing workflow and helping you to achieve a higher sample throughput.

All Prober Shuttles provide low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools (APT) hardware and software suite including Live Contact Tester (LCT) and Electron Beam Induced Current (EBIC) imaging modules.

The PS8 Prober Shuttle is the most compact and highly integrated nanoprobing system on the market. The new PS8e now adds positional encoders which enable faster and more efficient nanoprobing workflows.

The ability to automatically pre-align the probes is especially important for probing on the most recent technology nodes where beam sensitivity is an issue and thus, very low acceleration voltages are required. Using pre-defined alignment positions, all eight probes can be brought from their individual parked positions into close vicinity to each other at a consistent height above the sample – at the click of a button! This eliminates the tedious pre-alignment task which involved constant corrections of the astigmatism and/or necessitated switching to higher acceleration voltages.

The PS8e utilizes the MM4 ultra-flat three-axis manipulators that exhibit unmatched stability and precision. The entire height of the encoded system is 10 mm, retaining compatibility with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput.

Download a copy of the 2020 IPFA paper entitled “Locating low-ohmic Variations in Resistance using Electron Beam Induced Voltage Imaging”    ipfa_2020_EBIV

Compact and flexible

  • Small and practical
  • Plug-and-play system with modular components
  • Interfacing solutions for most SEM/FIB instruments (including load-lock compatibility)
  • Fast setup and removal
  • Pioneering cabling technology

Clear and simple

  • Intuitive control interfaces and software
  • User-friendly and easy to learn
  • Quick and easy probe tip exchange
  • Compact, stand-alone electronics
  • Effortless work with multiple manipulators

Robust and stable

  • Excellent stability
  • Low drift (1 nm/min)
  • Reliable operation (one year endurance test)
  • Virtually insusceptible to vibrations
  • Fast pre-positioning by hand

Fast and precise

  • High operating velocity (up to 10 mm/sec)
  • Sub-nanometer resolution (0.25 nm)
  • No backlash or reversal play
  • Extensive working range
  • Coarse and fine displacement in one drive

MM-PS4

  • Total height: 10 mm
  • Total width: 100 mm
  • Maximum sample size: 20 mm — 20 mm — 1 mm
  • Weight: 100 g + SEM/FIB dovetail

Next generation micromanipulators

A = left / right    B = up / down    C = in / out

  • Operating range: A = 10 mm, B = 90°, C = 5 mm
  • Resolution: A = < 0.5 nm, B = 5 nm, C = < 0.5 nm
  • Low drift: 1 nm/min

Low-capacity, low-current measurements

  • Noise: 20 fA @ 1 Hz
  • Insulation leakage current: <50 fA/V
  • Signal conductor resistance: <5 Ω
  • Maximum voltage: 100 V
  • Maximum current: 100 mA

The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform. A low-current measurement kit is integrated into each manipulator. The system includes control electronics, a joypad, a vacuum flange, a vacuum feedthrough, sample probe needles and an operator’s handbook.

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.

MM-PS8e

  • Total height: 10 mm
  • Total width: 140 mm
  • Maximum sample size: 20 mm — 20 mm — 1 mm*
  • Weight: 200 g + SEM/FIB dovetail
  • Clean cable management from flange to rack
  • Non-magnetic design
  • Ready for 5 nm and beyond

Next generation micromanipulators

A = left / right    B = up / down    C = in / out

  • Operating range: A = 5 mm, B = 90°, C = 5 mm
  • Resolution: A < 0.05 nm, B < 0.5 nm, C < 0.05 nm
  • Low drift: 1 nm/min

Encoder features

  • Park & restore probes with a click of a button
  • Drive substage to pre-defined locations
  • Fast cycle time

Low-capacity, low-current measurements

  • Noise: 25 fA @ 1 Hz
  • Insulation leakage current: <50 fA/V
  • Signal conductor resistance: <5 Ω
  • Maximum voltage: 100 V
  • Maximum current: 100 mA

The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform. A low-current measurement kit is integrated into each manipulator. The system includes control electronics, a joypad, a vacuum flange, a vacuum feedthrough, sample probe needles and an operator’s handbook.

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.

*larger sample sizes can be made possible through custom modifications

 

The PS range of  Kleindiek Prober Shuttles can be supplied in many different configurations. We would be happy to advise on the options and help configure the best specification for your application.

Ordering information:

MHS micro heating stages

MHS stages are available in two temperature versions