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MCS X-Y series SEM magnification calibration standards

EM-Tec MCS X-Y series of calibration standards share the same calibration range and MEMS manufacturing technology as the EM-Tec MCS series of magnification calibration standards. These fully featured, bi-directional calibration standards offer adjacent calibration patterns in both and X and Y direction. They are ideal for magnification calibration or critical dimension measurements in tabletop SEM, standard SEM, FESEM, FIB, Auger, SIMS and reflected light microscopes.
Two types of calibration ranges for the MCS X-Y calibration standards are available, both calibration ranges with certificate of traceability or with an individual certificate of calibration:

  • EM-Tec MCS-1-XY with X-Y scales ranging from 2.5mm to 1µm – ideal for table top and compact SEMs. Covering the 10x to 20,000x magnification range.
    We offer a traceable and a certified  version
  • EM-Tec MCS-0.1-XY with X-Y scales ranging from 2.5mm down to 100nm – ideal for SEM, FESEM and FIB systems. Covering 10x to 200,000 magnifications.
    We offer a traceable and a certified version

Features on the EM-Tec MCS X-Y series are made using state-of the-art MEMS manufacturing techniques with high contrast chromium deposited lines for the larger features and gold over chromium for the smaller features below 2.5µm. The gold deposited features ensure optimum signal to noise ratio for calibration purposes.

Advantages of EM-Tec MCS X-Y series are:

  • Unprecedented precision over the full calibration range in both X and Y direction
  • All X-Y features in one single ultra-flat plane
  • Metal-on-silicon with excellent signal-to-noise ratio
  • Wider range of features to accurately calibrate low, medium and high magnification ranges
  • Compatible with both SE and BSE imaging modes
  • Fully conductive materials
  • Easy to convert X-Y metric feature sizes
  • Can be cleaned with plasma cleaning
  • All NIST traceable or optionally certified

The EM-Tec MCS-0.1 calibration standard is an excellent replacement for the discontinued SIRA calibration standard (which was using only 0.51 and 0.463µm features), but with added advantages. Compatible feature sizes for the SIRA standard are 50µm (5 x 10µm) and 0.5µm (500nm).

Technical support bulletin: TSB 31-T31020 EM-Tec MCS X-Y Magnification Calibration Standards

Specifications of MCS series calibration standards

Substrate 525µm thick boron doped ultra-flat wafer with <100> orientation
Conductive Excellent; 5-10 Ohm resistivity
Pattern size 2.5 x 2.5mm
Chip size 4 x 4 mm (unmounted)
Features MCS-1-XY 2.5, 1.0, and 0.5mm both in X and Y direction
250, 100, 10, 5, 2.5 and 1µm both adjacent in X and Y direction
Features MCS-0.1-XY with additional 500, 250 and 100nm both adjacent in X and Y direction
Features material 50nm Chromium for feature sizes 2.5mm to 2.5µm
50nm Gold over 20nm Chromium for size 1µm to 100nm
Traceable uniformity 0.2% or better
Certified uniformity 0.03%
Traceable uncertainty 0.7% or better
Certified uncertainty 0.09%
Traceability Wafer level NIST traceability; average data measured on each production wafer
Certified Optional; each certified EM-Tec MCS standard is individually
calibrated against a NIST measured standard
Application SEM, FESEM, FIB, Auger, SIMS and reflected light microscopy
Identification Product ID with serial number etched
Mounting Mounting available on popular SEM stubs
Supplied Unmounted: supplied in a Gel-Pak box

The EM-Tec MCS-0.1-XY calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger and SIMS systems. It is suitable for magnifications from 10x to 200,000x. It has bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1-XY are:

2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm in both X and Y direction.

31-T32040 EM-Tec MCS-0.1TR-XY is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. A good alternative to the discontinued SIRA calibration standard.

The EM-Tec MCS-1-XY calibration standard has been developed to accurately calibrate tabletop SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. It has bright chromium deposited features on ultra-flat conductive silicon.

The feature sizes for the MCS-1-XY are:

2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm in X and Y direction.

The 31-T31000 EM-Tec MCS-1TR-XY is traceable on the wafer level against a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs.

The EM-Tec MCS-1-XY calibration standard has been developed to accurately calibrate tabletop SEM, reflected light microscopes, compact SEMs and low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon.

The feature sizes for the MCS-1-XY are:

2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm in both X and Y direction.

The 31-C31000 EM-Tec MCS-1CF-XY is individually certified utilising a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs.

The EM-Tec MCS-0.1-XY calibration standard has been developed to accurately calibrate SEM, FE-SEM, FIB, Auger and SIMS systems. Suitable for magnifications from 10x to 200,000x. It has bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast.

The feature sizes for the MCS-0.1-XY are:

2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm in both X and Y direction.

The 31-T32040 EM-Tec MCS-0.1TR-XY is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. A good alternative to the discontinued SIRA calibration standard.

The EM-Tec MCS-0.1-XY calibration standard has been designed so that it most accurately calibrates SEM, FE-SEM, FIB, Auger and SIMS systems. Suitable for magnifications from 10x to 200,000x. It has bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features in X and Y direction. The metal lines on silicon exhibit excellent signal with high contrast.

The feature sizes of MCS-0.1-XY are:

2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm in X and Y direction.

The 31-C32000 EM-Tec MCS-0.1CF-XY is individually certified utilising a NIST calibrated standard. Offered unmounted or mounted on most popular SEM stubs. Excellent alternative to the discontinued SIRA calibration standard, but with easier to use compatible feature sizes.

Ordering information:

MCS-1TR-XY traceable calibration standards

MCS-1CF certified calibration standards

MCS-0.1TR-XY traceable calibration standards

MCS-0.1CF-XY certified calibration standards