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Multiple target graticules

Micro-Tec MTC-5 multiple target graticule calibration standards have been designed by Micro to Nano using an ultra-flat conductive silicon substrate with corrosion resistant chromium lines. These innovative standards have precise patterns that are manufactured using the latest semiconductor manufacturing techniques and provide bright and rich contrast images for ease of calibration. Intended for use with reflective light imaging, optical quality control systems and low magnification SEM imaging for:

  • Magnification calibration
  • Critical dimension measurements
  • Distortion correction
  • Imaging quality assessment
  • Quality control measurements

There are four distinct patterns on the Micro to Nano MTC-5 calibration standard:

  1. Circle patterns from 10µm to 5mm in diameter
  2. Square patterns from 10 x 10µm to 5 x 5mm
  3. Hexagon patterns from 10µm to 5mm across
  4. Cross-scale pattern of 5 x 5mm with 0.01mm divisions

The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulating dust particles in the patterns.

Each of the calibration standards has a unique product ID serial number etched on the die. MTC-5 calibration standards are NIST traceable, and a wafer level certificate of traceability is supplied with each standard. The MTC-5 is available in two versions:

  • MTC-5 with Cr lines on silicon for bright field imaging
  • MTCD-5 with inverted pattern (area between line coated with Cr) for dark field imaging

Specifications

Substrate 525µm thick boron doped ultra-flat wafer with <100> orientation
Conductive Excellent; 5-10 Ohm resistivity
Patterns Circles, squares, hexagons, cross scale
Pattern size 5 x 5mm (4x)
Lines  75nm thick, pure bright chromium lines
5µm wide lines spaced 10, 25, 50, 75, 100, 125 and 150µum apart
10µm wide lines, spaced 200, 250, 300, 350, 400, 500, 600, 700, 800 and 900µm apart
20µm wide lines spaced 1.0, 1.5, 2, 2.5, 3, 3.5, 4, 4.5 and 5mm apart
Cross scale pattern 5mm wide lines, 5 x 5mm with 0.01mm divisions
Die size 12 x 12mm
Application Reflective light, scanning electron microscopy, optical imaging systems
Identification Product ID with serial number etched
Mounting Unmounted, mounting optionally available
Supplied Supplied in a Gel-Pak box

 

 

MTC-5 Multiple target calibration standard with four patterns – bright field

The Micro-Tec MTC-5 bright field multiple target calibration standard comprises accurately deposited bright chromium lines on a conductive ultra-flat silicon substrate. The MTC-5 has been designed for calibrating reflective light microscopes, stereo microscopes, optical quality control systems and for low magnification SEM imaging. The MTC-5 incorporates four distinct patterns: circle patterns from 10µm to 5mm diameter, square patterns from 10 x 10µm to 5 x 5mm, hexagon patterns from 10µm to 5mm across and cross-scale patterns of 5 x 5mm with 0.01mm divisions.

The four chromium deposited patterns are all in the same focal plane and provide a superior signal compared to etched patterns. The MTC-5 is a NIST-traceable standard.

For an example of wafer level certificate of traceability for the Micro-Tec MTC-5 multiple target calibration standard. TSB 31-T33600 Micro-Tec MTC-5 certificate of traceability MTC-5 VB01 Rev. 1.

MTC-5 Multiple target calibration standard with four patterns – dark field

MTCD-5 dark field multiple target calibration standard is made up of four inverted patterns: chromium deposited area with features left undeposited showing the silicon substrate. Designed for dark field applications in reflected light microscopy, optical quality control systems and for low magnification SEM imaging. The large chromium coated area can also be used to assess the ability of optical systems to distinguish features in high brightness and high reflection applications.

Patterns are: inverted circle patterns from 10µm to 5mm diameter, inverted square patterns from 10 x 10µm to 5 x 5mm, inverted hexagon patterns from 10µm to 5mm across and inverted cross-scale patterns of 5 x 5mm with 0.01mm divisions. The four chromium deposited patterns are all in the same focal plane and provide a superior signal compared to etched patterns.

The Micro-Tec MTCD-5 is a NIST traceable standard.

An example of a wafer level certificate of traceability for the Micro-Tec MTCD-5 multiple target calibration standard TSB 31-T33700 Micro-Tec MTCD-5 certificate of traceability MTCD-5 VB01 Rev. 1

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