Silicon grid calibration standard
EM-Tec M1 and EM-Tec M-10 calibration standards from Micro to Nano both have a square mesh grid pattern etched in the surface of an ultra-flat Si substrate. Grid patterns are practical tools for magnification calibration and image distortion assessments. They are intended for use for SEM, FESEM, FIB, Auger, SIMS and reflected light microscopy applications. Specimens can also be mounted directly on the pattern – in this case the pattern in the background will give a direct calibration within the image. This is especially useful when working with small specimens and powders. The Micro to Nano EM-Tec M1 and M-10 grid pattern calibration standards are supplied with a wafer level certificate of traceability to NIST.
There are two types of grid pattern calibration standards:
EM-Tec M-1 with a 1µm pitch grid pattern for the 100x to 10,000x magnification range
EM-Tec M-10Â with a 10um pitch grid pattern for the 100x to 1000x magnification range
EM-Tec M-1
This standard has a grid pattern with a pitch of 1 µm and lines at 1, 10 and 100µm. It is useful for calibration and image distortion checks in the 100x to 10,000x magnification range. Alternatively, specimens can be placed directly on the grid pattern for immediate calibration or internal calibration in the image – particularly useful for small specimens. The lines are etched directly into the ultra-flat Si substrate which will give superior signal strength compared to SiO2 etched structures.
This standard is NIST traceable; example of wafer level certificate of traceability for the EM-Tec M-1 grid pattern calibration standard.
Intended for SEM, FESEM, FIB, Auger, SIMS and reflected light microscopy
 Substrate
525µm thick boron doped ultra-flat wafer with <100> orientation
Conductivity
Excellent – Â 5-10 Ohm resistivity
Pattern size
3 x 3mm
Pitch/precision
1µm ± 0.025µm, 10µm ± 0.025µm and 100µm ± 0.25µm
Line type /Â depth
Etched in Si, 300nm ± 30nm deep lines
Line widthÂ
200nm ± 10nm for 1µm pitch lines
300nm ± 15nm for 10µm pitch lines
400nm ± 20nm for 100 µm pitch lines
Perpendicularity
Better than 0.01°
Markers Â
Edge fiducial markers for grid position finding
Die size
4 x 4mm
Application
SEM, FESEM, FIB, Auger, SIMS and reflected light microscopy
Identification
Product ID with serial number etched
Mounting
Unmounted, mounting optionally available
SuppliedÂ
Supplied in a Gel-Pak box
Certification
Wafer level certificate of traceability to NIST
Ordering information:
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Calibration standard with 1µm grid pattern – unmounted
EM-Tec M-1 calibration standard with 1µm grid pattern – unmounted (each)
£95.30 Add to basket -
Calibration standard with 1µm grid pattern on a 12.7mm pin
EM-Tec M-1 calibration standard with 1µm grid pattern – mounted on standard 12.7mm pin stub (each)
£105.33 Add to basket -
Calibration standard with 1µm grid pattern on a short 12.7mm pin
EM-Tec M-1 calibration standard with 1µm grid pattern – mounted on short 12.7mm pin stub (each)
£105.33 Add to basket -
Calibration standard with 1µm grid pattern on a JEOL 15mm stub
EM-Tec M-1 calibration standard with 1µm grid pattern- mounted on 12.2mm JEOL stub (each)
£122.88 Add to basket -
Calibration standard with 1µm grid pattern on a Hitachi stub
EM-Tec M-1 calibration standard with 1µm grid pattern- mounted on 15mm Hitachi stub (each)
£105.33 Add to basket
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Calibration standard with 10µm grid pattern on 12.7mm pin
EM-Tec M-10 calibration standard with 10µm grid pattern – mounted on standard 12.7mm pin stub (each)
£105.33 Add to basket -
Calibration standard with 10µm grid pattern on pin stub
EM-Tec M-10 calibration standard with 10µm grid pattern – mounted on Zeiss 12.7mm pin stub (each)
£105.33 Add to basket -
Calibration standard with 10µm grid pattern on JEOL stub
EM-Tec M-10 calibration standard with 10µm grid pattern – mounted on 12.2mm JEOL stub (each)
£122.88 Add to basket -
Calibration standard-10µm grid pattern- on 15mm Hitachi stub
EM-Tec M-10 calibration standard with 10µm grid pattern – mounted on 15mm Hitachi stub (each)
£105.33 Add to basket -
Calibration standard with 10µm grid pattern- unmounted
EM-Tec M-10 calibration standard with 10µm grid pattern, unmounted (each)
£95.30 Add to basket