Large area magnification
EM-Tec LAMC-15 calibration standard
The unique Micro to Nano EM-Tec LAMC-15 calibration standard has been designed for large area and low magnification calibration. It is constructed using an ultra-flat conductive silicon substrate with bright chromium deposited lines. Ideal for SEM and reflected light microscopy with the following applications:
- Low magnification calibration
- Large area magnification calibration
- Particle analysis measurements
- GSR measurements
- Microscope stage linearity and reproducibility measurements
- Digital imaging systems
The Micro to Nano EM-Tec LAMC-15 is for use in the 5-1000x magnification range. The patterns on this calibration standard are:
- Cross-grating of 15 x 15mm with 0.01mm divisions
- 15mm grating lines with 0.01mm divisions on opposite ends
- Cross-hairs at each 0.1mm interval
- Larger cross hairs at each 1mm interval
The cross hairs allow for easy navigation and for testing the linearity of both low magnification imaging and the backlash on a (motorised) microscope stage. The deposited Cr lines are in the same focus plane as the substrate, are better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns. Each of the calibration standards has a unique product ID serial number etched on the die. Available as unmounted or mounted on popular SEM sample stubs or black metal slide. Use an EM-Tec SEM stub adaptor if you wish to use this calibration standard on multiple SEM platforms.
The EM-Tec LAMC-15 is a NIST traceable magnification calibration standard. Example of wafer level certificate of traceability which is supplied with each Em-Tec LAMC-15.
Substrate
525µm thick boron-doped ultra-flat wafer with <100> orientation
ConductiveÂ
Excellent: 5-10 Ohm resistivity
PatternsÂ
Graticules, lines and fiducials
Pattern size
15 x 15mm
LinesÂ
75nm thick, pure bright chromium lines
Divisions
0.01mm, 0.1mm and 1.0mm
Die size
17 x 17mm
Application
 SEM, reflective light, stereo microscopes, optical imaging systems
Identification
Product ID with serial number etched
MountingÂ
Unmounted, mounting optionally available
Supplied
Supplied in a Gel-Pak box
The EM-Tec LAMC-15 is a NIST traceable magnification calibration standard. Example of wafer level certificate of traceability which is supplied with each Em-Tec LAMC-15.
TSB 31-T33000 EM-Tec LAMC-15 certificate of traceability LMC-VB01 Rev.1 (1)
Ordering information:
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Large area magnification calibration standard on a pin stub
EM-Tec LAMC-15 large area magnification calibration standard – mounted on 25.4mm pin stub (each)
£268.02 Add to basket -
Large area magnification calibration standard on a JEOL stub
EM-Tec LAMC-15 large area magnification calibration standard – mounted op 25mm JEOL stub (each)
£268.02 Add to basket -
Large area magnification calibration standard on a Hitachi stub
EM-Tec LAMC-15 large area magnification calibration standard – mounted on 25mm Hitachi stub (each)
£268.02 Add to basket -
Large area magnification calibration standard on a black slide
EM-Tec LAMC-15 Llrge area magnification calibration standard – mounted on black microscope slide (each)
£268.02 Add to basket -
Large area magnification calibration standard – unmounted
EM-Tec LAMC-15 large area magnification calibration standard – unmounted (each)
£258.62 Add to basket