MHS Micro Heating Stages
Kleindiek MHS Micro Heating Stages are stand alone miniaturized heating stages for use in your experimental SEM/FIB system. The units have an integrated heating and sensing system in order to maintain the temperature set using the included Temperature Control System.
Your existing Kleindiek MM3 micromanipulator system can be quickly and easily upgraded for use with a MHS Micro Heating Stage. These uniquely compact heating stages are available in two versions; up to 200C and up to 450C. For heating and cooling the Kleindiek MHCS heating and cooling stage covers a wide range of temperatures from -55C to +125C.
Brochure downloads:
Applications include:
- IC stress testing
- Ageing tests
- Re-soldering bond pads
- Semiconductor characterization at different temperatures
- Curing of components & glues using temperature ramps
Dimensions: Diameter: 16 mm. Overall height: 10 mm. Pin length: 6 mm. Pin diameter: 3.2 mm.
Temperature range at air: RT – 100°C. Temperature range in vacuum: RT – 200°C. Temperature resolution: 1°C. Temperature stability of sensor: better than 0.05% at 200°C after 1000 h. Temperature accuracy: 0.5%. Analog voltage output accuracy:0.5% (after offset correction).
Heating-up time from room temperature:100 s to 100°C, 200 s to 200°C (in vacuum, depending on vacuum level).
Cooling-down time from 200°C:200 s to 100°C, 600 s to 45°C (in vacuum, depending on vacuum level).
Pressure range: 1E-7 mbar to 1200 mbar.
For ease of use the heating stage is fitted with a sliding sample plate that can be inserted into the stage’s receptacle. The system includes a temperature control unit and an operator`s handbook.
Dimensions: Diameter: 14 mm, Overall height: 14 mm, Pin length: 6 mm, Pin diameter: 3.2 mm.
Temperature range at air: RT – 200°C, Temperature range in vacuum: RT – 450°C ,Temperature resolution: 0.1°C, Temperature accuracy: Tolerance class B according to DIN EN 60751
Heating-up time from room temperature: 100 s to 100°C, 200 s to 400°C (in vacuum, depending on vacuum level)
Cooling-down time from 400°C: 100 s to 200°C, 300 s to 100°C (in vacuum, depending on vacuum level)
Pressure range: 1E-7 mbar to atmospheric pressure
The MHS450 is supplied with special sample holders that can be inserted into the heating stage’s receptacle. The system includes a temperature control unit and an operator`s handbook.
The Micro Heating Stages (MHS) have the same form factor as standard SEM stubs and can be mounted to your SEM stage in the same way as stubs. The MHS heating stages are supplied with a temperature control unit which allows the stage to be heated from room temperature up to 200°C or 450°C depending on the model. MHS Micro Heating Stages utilise the same feedthrough system as Kleindiek micromanipulators and can be used in conjunction with our other micromanipulation products.
Ordering information:
MHS micro heating stages
MHS stages are available in two temperature versions
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Micro heating stage
The Micro Heating Stage (MHS) has the same form factor as standard SEM stubs and can be mounted to an SEM stage in the same way as stubs. The heating stage is supplied with a temperature control unit which allows the stage to be heated from room temperature up to 200°C. For ease of use the heating stage is fitted with a sliding sample plate that can be inserted into the stage receptacle. The Micro Heating Stage utilizes the same feedthrough system as Kleindiek micromanipulators and can be used in conjunction with our other micromanipulation products. Dimensions: diameter: 16mm, overall height: 10mm, pin length: 6mm, Pin diameter: 3.2mm, temperature range at air: RT – 100°C, temperature range in vacuum: RT – 200°C, temperature resolution: 1°C, temperature stability of sensor: better than 0. 200°C after 1000 hr. Temperature accuracy: 0.5%, analog voltage output accuracy: 0.5% (after offset correction), heating-up time from room temperature: 100 s to 100°C, 200s to 200°C (in vacuum, depending on vacuum level). Cooling-down time from 200°C :200 s to 100°C, 600 s to 45°C (in vacuum, depending on vacuum level). Pressure range: 1E-7 mbar to 1200 mbar. The system includes a temperature control unit and an operator handbook.
Price On Request £0.00 Add to basket -
Micro heating stage for up to 450°C
The Micro Heating Stage 450C (MHS450) is built in the same form factor as standard SEM stubs and can be mounted to your SEM stage in the same way as stubs. The heating stage is supplied with a temperature control unit which allows the stage to be heated from room temperature up to 450°C. The MHS450 is supplied with special sample holders that can be inserted into the heating stage’s receptacle. Mounting samples to these holders is achieved using a special carbon-based adhesive. The Micro Heating Stage utilizes the same feedthrough system as Kleindiek micromanipulators and can be used in conjunction with our other micromanipulation products. Technical specifications: diameter: 14mm, overall height: 14mm, pin length: 6mm, pin diameter: 3.2mm, temperature range at air: RT – 200°C, temperature range in vacuum: RT – 450°C , temperature resolution: 0.1°C. Temperature accuracy: tolerance class B according to DIN EN 60751. Heating-up time from room temperature: 100s to 100°C, 200s to 400°C (in vacuum, depending on vacuum level). Cooling-down time from 400°C: 100s to 200°C, 300s to 100°C (in vacuum, depending on vacuum level). Pressure range: 1E-7 mbar to atmospheric pressure. The system includes a temperature control unit and an operator`s handbook.
Price On Request £0.00 Add to basket