MHS Micro Heating Stages

Kleindiek MHS Micro Heating Stages are stand alone miniaturized heating stages for use in your experimental SEM/FIB system. The units have an integrated heating and sensing system in order to maintain the temperature set using the included Temperature Control System.

Your existing Kleindiek MM3 micromanipulator system can be quickly and easily upgraded for use with a MHS Micro Heating Stage. These uniquely compact heating stages are available in two versions; up to 200 C and up to 450 C.  For heating and cooling the Kleindiek MHCS heating and cooling stage covers a wide range of temperatures from -55C to +125C.

Applications include:

  • IC stress testing
  • Ageing tests
  • Re-soldering bond pads
  • Semiconductor characterization at different temperatures
  • Curing of components & glues using temperature ramps

Technical specifications MHS200

Dimensions: Diameter: 16 mm. Overall height: 10 mm. Pin length: 6 mm. Pin diameter: 3.2 mm.

Temperature range at air: RT – 100°C. Temperature range in vacuum: RT – 200°C. Temperature resolution: 1°C. Temperature stability of sensor: better than 0.05% at 200°C after 1000 h. Temperature accuracy: 0.5%. Analog voltage output accuracy:0.5% (after offset correction).

Heating-up time from room temperature:100 s to 100°C, 200 s to 200°C (in vacuum, depending on vacuum level).

Cooling-down time from 200°C:200 s to 100°C, 600 s to 45°C (in vacuum, depending on vacuum level).

Pressure range: 1E-7 mbar to 1200 mbar.

For ease of use the heating stage is fitted with a sliding sample plate that can be inserted into the stage’s receptacle. The system includes a temperature control unit and an operator`s handbook. 

Technical specifications MHS450

Dimensions: Diameter: 14 mm, Overall height: 14 mm, Pin length: 6 mm, Pin diameter: 3.2 mm.

Temperature range at air: RT – 200°C, Temperature range in vacuum: RT – 450°C ,Temperature resolution: 0.1°C, Temperature accuracy: Tolerance class B according to DIN EN 60751

 

Heating-up time from room temperature: 100 s to 100°C, 200 s to 400°C (in vacuum, depending on vacuum level)

Cooling-down time from 400°C: 100 s to 200°C, 300 s to 100°C (in vacuum, depending on vacuum level)

Pressure range: 1E-7 mbar to atmospheric pres­sure

The MHS450 is supplied with special sample hold­ers that can be inserted into the heating stage’s receptacle. The system includes a temperature control unit and an operator`s handbook.

The Micro Heating Stages (MHS) have the same form factor as standard SEM stubs and can be mounted to your SEM stage in the same way as stubs. The MHS heating stages are supplied with a temperature control unit which allows the stage to be heated from room temperature up to 200°C or 450°C depending on the model.  The MHS Micro Heating Stages utilise the same feedthrough system as Kleindiek micromanipulators and can be used in conjunction with our other micromanipulation products.

Ordering information:

MHS micro heating stages

MHS stages are available in two temperature versions