150W RF power supply upgrade
7 inch resistive LCD industrial touchscreen controller. Fully automatic operation with 20 recipe support. Job sequence mode operation for executing three cleaning steps. Two mass flow controller (MFC) regulated gas inputs (can support up to three MFC upon request). Corrosion resistant pirani pressure sensor. Venting/purging port with electronic solenoid valve (Swagelock 1/4″ compression fitting). One pumping port with electronic shutoff valve and standard NW/KF25 vacuum port.