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4 inch wafer holder, made of aluminium
4 inch quartz wafer boat, 50 slots, for Tergeo-plus and Tergeo-Pro system
6 inch wafer holder, made of aluminium
Edwards RV3 two stage rotary vacuum pump
Safematic CCU-010 LV compact, fully automatic, standard vacuum coating system.
Glow discharge attachment for hydrophilic/hydrophobic treatment (rendering) of substrates (e.g. TEM carbon support films). Fully integrated to allow post-treatment of carbon films without the need to break vacuum after carbon coating
HS-010 head storage box for maintaining sputtering or carbon modules under vacuum when not in use.