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ProbeWorkstation with eight probes
ProbeWorkstation with Eight Probes. A powerful dedicated probing solution, for in-situ or ex-situ. The system is comprised of eight of the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform with an integrated super-flat three-axis substage. The system is capable of low-current low-capacity measurements and is enhanced by the Advanced Probing Tools software and hardware suite. The APT suite includes:- Live Contact Tester- Safe Tip Approach- Tip2Tip Tester- Fast Transistor Characterisation- Tip Cleaning module- Keithley remote control- EBIC/EBAC amplifier as well as iProbeAll of which are operated from a unified graphic user interface installed on the included PC which is accessed using the microscope’s peripherals. – A vacuum flange and vacuum feedthrough- A full rack, 24 pre-cleaned, individually vacuum packed probe tips with 150 nm tip radius- System documentation