Tergeo-Plus plasma cleaner, 150W
Tergeo-plus plasma cleaner 150W 13.56MHz. Thick walled (5mm) quartz tube with inner diameter of 160mm and an outer diameter of 170mm and a depth of 280mm. In-situ plasma source for immersion mode cleaning. Plasma sensor for quantitative plasma intensity measurement. 150W 13.56MHz high frequency RF supply with auto-matching. Adjustable from 1 to 150W at 1W intervals. No pulsing mode. 7inch resistive LCD industrial touchscreen controller. Fully automatic operation with 20 recipe support. Job sequence mode operation for executing three cleaning steps. Two mass flow controller (MFC) regulated gas inputs (supports up to three MFC upon request). Corrosion resistant Pirani pressure sensor. Venting/purging port with electronic solenoid valve (Swagelock 1/4″ compression fitting). Pumping port with electronic shut off valve and standard NW/KF25 vacuum port.