Tergeo-Pro 150W plasma cleaner with 230mm/9” chamber

Tergeo-Pro 150W plasma cleaner with 230mm/9” chamber. In-situ plasma source for direct mode cleaning. Plasma emission sensor for quantitative plasma emission intensity measurement. 150W, 13.56MHz high frequency RF supply.

Tergeo-Pro 150W plasma cleaner with 230mm/9” chamber. Consisting of:

• Thick-wall (5mm) quartz tube ID: 230mm, OD: 240mm, depth: 3400mm
• Quartz plate substrate holder (220 X 280mm) included in the chamber
• In-situ plasma source for direct mode cleaning. Optional integrated remote source available (see: PIE-TR102
• Plasma emission sensor for quantitative plasma emission intensity measurement.
• 150W, 13.56MHz high frequency RF supply. Adjustable from 1 to 150W at 1W intervals. Optional upgrades to 300W (PIE-TR104) or 500W (PIE-TR101) available
• Auto tune for immersion plasma source
• Continuous plasma with option of pulsed plasma mode (PIE-TP104) allowing ratio to be varied from 100% to <1%. Wide plasma intensity range
• 7-inch resistive LCD industrial touchscreen controller
• Fully automatic operation with 20 recipe support
• Job sequence mode of operation for three cleaning steps
• Two mass flow controller (MFC) regulated gas inputs. Optional third mass flow controller available (PIE-TR103).
• Premium pressure sensor (1E^-4Torr to ATM) with corrosion resistant platinum filament
• Venting/purging port with electronic solenoid valve (Swagelock 1/4″compression fitting)
• KF25 pumping port with an integrated isolation valve to isolate the chamber and pump during venting

Vacuum pump required: see options