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3rd MFC regulated gas input
SP-011 sputtering head module for applications where high sputtering rates are required
Peak pumping speed 11.4m3/hr (6.7cfm). Ultimate pressure 0.007 mbar (0.005torr) Pump controller with push button control Remote serial and parallel control plus USB service interface Supply 100-127/200-240V (+/- 10%) 1ph 50/60Hz without user intervention Inlet port: NW25. Exhaust port: NW25
Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.
Silencer for nXDS and XDS10i scroll pumps (not connected to a house exhaust system). Silencer also offers exhaust filtration.