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XYZ substage for UHV with encoders on X & Y
XYZ substage for UHV applications with encoders on X amd Y, substage with 20mm travel. Featuring integrated optical positional encoders for the X and Y axes. The system includes control electronics, joypad, PC software with a three-point alignment tool and an operator’s handbook. Vacuum flange and vacuum feedthrough(s) to be supplied by the customer.