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EM-Tec wafer holders for SEM

EM-Tec wafer holders are specially designed to hold semiconductor wafers in sizes of 51mm, 76mm, 100mm, 150mm and 200mm diameter (2 inch, 3 inch, 4 inch, 6 inch and 8 inch). They are compatible with wafers with either a flat or with a notch. The unique locking slide is adjustable to cope with non-standard wafers. Made from vacuum compatible aluminium and self-lubricating brass.

Unique features of EM-Tec wafer holders:

  1. Low profile, weight balanced support disc
  2. Square cut-outs for wafer tweezers
  3. Adjustable spring tension
  4. Adjustable for non-standard wafers
  5. Self-lubricating locking slide
  6. Compatible with either wafers with a notch or wafers with a flat
  7. Compatible with EM-Tec stage adaptors for all SEM platforms

Available with:

  • Standard pin to fit on SEMs which use standard pins: ThermoFsher Scientific/FEI, Philips, Zeiss, LEO, Leica, Tescan,  Cambridge Instruments, CamScan, SEMs.
  • M4 threaded hole, compatible with Hitachi SEMs, FE-SEMs and table top SEMs and with the EM-Tec versatile SEM stage adaptors
  • Ø14mm JEOL stub compatible with JEOL and EM-Tec stage adaptors with a Ø14mm connection

Please note: When using the larger wafer holders (6in / 150mm and above) we would recommend the M4 version combined with a stage adaptor for your make and model of SEM/FIB. The stage adaptor easily screws into the base of the wafer holder and ensures maximum stability when in use. Please see our wide range of stage adaptors.

Capacity and dimensions of EM-Tec wafer holders:

Product # Type Wafer sizes Dimensions w/o pin Securing method SEM stage comp.
12-000282 W2 51mm / 2” Ø76x18mm Springloaded slide Standard 3.2mm pin
12-000382 W2 51mm / 2” Ø76x18mm Springloaded slide M4 thread
12-000682 W2 51mm / 2” Ø76x18mm Springloaded slide Ø14mm JEOL stub
12-000293 W3 76mm / 3” Ø76x18mm Springloaded slide Standard 3.2mm pin
12-000393 W3 76mm / 3” Ø76x18mm Springloaded slide M4 thread
12-000693 W3 76mm / 3” Ø76x18mm Springloaded slide Ø14mm JEOL stub
12-000284 W4 100mm / 4” Ø106x16mm Springloaded slide Standard 3.2mm pin
12-000384 W4 100mm / 4” Ø106x16mm Springloaded slide M4 thread
12-000684 W4 100mm / 4” Ø106x16mm Springloaded slide Ø14mm JEOL stub
12-000286 W6 150/mm / 6” Ø156x16mm Springloaded slide Standard 3.2mm pin
12-000386 W6 150mm / 6” Ø156x16mm Springloaded slide M4 thread
12-000686 W6 150mm / 6” Ø156x16mm Springloaded slide Ø14mm JEOL stub
12-000288 W8 200mm / 8” Ø206x16mm Springloaded slide Standard 3.2mm pin
12-000388 W8 200mm / 8” Ø206x16mm Springloaded slide M4 thread
12-000688 W8 200mm / 8” Ø206x16mm Springloaded slide Ø14mm JEOL stub

 

Ordering information: