Kleindiek LCMK low current measurement kit

	high precision microprobing tool for MM3A
	high precision positioning and sensitivity
	quick and easy to fit to MM3A-EM

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The LCMK-EM is a low-resistance, low-noise probe tip holder for the MM3A-EM micromanipulator. It enhances your system's nanoprobing capability by allowing low-capacity, low-current measurements on conductive specimens.

Standard tungsten probe tips can be inserted into the front of the LCMK-EM tip holder. Triax cabling and feedthroughs carry signals through to a connector which fits all conventional parameter analysers.

In addition to the standard version for SEM/FIB it is also available in versions for UHV, high temperature, low temperature and life sciences.

Applications:

failure analysis
qualification of high к gate materials
low-current transistor measurement
EBIC/RCI analysis
electrical characterization of advanced materials e.g. nanowires, ultra-thin films

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Specifications

Standard version Part number PL-LCMK1-000

A plug-in tool for the MM3A-EM to allow low-current, low-capacity measurements on conductive samples. Each kit consists of a probe tip holder, vacuum and air-side triax cabling and a vacuum feedthrough. A vacuum flange and an operator's handbook is also included with each delivery. One kit required per MM3A.

Current measurement limit: 3 fA @ 1 Hz
Insulation leakage current: 50 fA at 1 V
Signal conductor resistance: 0.9 Ω
Maximum voltage: ±210 V
Maximum current: 200 mA
Maximum frequency: 100 MHz

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.