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Kleindiek LT12830 Substage with 30mm travel and 50nm repeatability

The LT12830 substage is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages. 

It is suitable for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.

It is built specifically for lithography, cell counting, nanoprobing, and failure analysis applications and contains two positional encoders per axis for automatic yaw error compensation.

Optional software for three-point alignment is available.

The LT3310 is available in different versions with combinations of X,Y,Z,R movement.

LT3310 stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.

The LT3310 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. Its smooth motion and rotational axis make it ideal for cell counting. In addition, the LT3310 is designed for nanomanipulation applications where weight and space are highly restricted and for high-precision work in extreme environments.

Brochure download:

LT12830 substage

Compact and flexible

  • Small and practical
  • Plug-and-play system with modular components
  • Interfacing solutions for most microscopes
  • Fast setup and removal

Clear and simple

  • Result-oriented operation and increased throughput
  • Intuitive control interfaces and software
  • User-friendly and easy to learn
  • Compact, stand-alone electronics with PC interface
  • Pioneering cabling technology

Robust and stable

  • Compact construction delivers higher resonance frequencies
  • Excellent stability
  • Low drift (1 nm/min)
  • Reliable operation (one year endurance test)
  • Virtually insusceptible to vibrations
  • Fast pre-positioning by hand

Fast and precise

  • No backlash or reversal play
  • Sub-nanometer resolution (0.25 nm)
  • Integrated coarse and fine displacement in one drive
  • High operating velocity (up to 10 mm/sec)
  • Smooth motion
    • Length: 128 mm
    • Width: 128 mm
    • Height: 16 mm
    • Weight: 520 g
    • Travel X and Y: 28.5 mm
    • Speed: up to 2 mm/s
    • Resolution: < 0.03 nm
    • Repeatability: 50 nm
    • Angular deviation: < 1 µrad
    • Load: 500 g
    • Temperature range: 273 K to 353 K
      UHV version: 273 K to 393 K
    • Lowest pressure: 10–7 mbar
      UHV version: 2 x 10–10 mbar
    • Substage mounting: 4 x 3.2 mm holes
    • Sample mounting: Clip or 2 x M3 holes
    • Material: Stainless steel

    All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.

Ordering information:

Kleindiek LT12830 substage versions