Kleindiek LT12830 Substage with 30mm travel and 50nm repeatability
The LT12830 substage is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.Â
It is suitable for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.
It is built specifically for lithography, cell counting, nanoprobing, and failure analysis applications and contains two positional encoders per axis for automatic yaw error compensation.
Optional software for three-point alignment is available.
The LT3310 is available in different versions with combinations of X,Y,Z,R movement.
LT3310 stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.
The LT3310 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. Its smooth motion and rotational axis make it ideal for cell counting. In addition, the LT3310 is designed for nanomanipulation applications where weight and space are highly restricted and for high-precision work in extreme environments.
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Compact and flexible
- Small and practical
- Plug-and-play system with modular components
- Interfacing solutions for most microscopes
- Fast setup and removal
Clear and simple
- Result-oriented operation and increased throughput
- Intuitive control interfaces and software
- User-friendly and easy to learn
- Compact, stand-alone electronics with PC interface
- Pioneering cabling technology
Robust and stable
- Compact construction delivers higher resonance frequencies
- Excellent stability
- Low drift (1 nm/min)
- Reliable operation (one year endurance test)
- Virtually insusceptible to vibrations
- Fast pre-positioning by hand
Fast and precise
- No backlash or reversal play
- Sub-nanometer resolution (0.25 nm)
- Integrated coarse and fine displacement in one drive
- High operating velocity (up to 10 mm/sec)
- Smooth motion
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- Length: 128 mm
- Width: 128 mm
- Height: 16 mm
- Weight: 520 g
- Travel X and Y: 28.5 mm
- Speed: up to 2 mm/s
- Resolution: < 0.03 nm
- Repeatability: 50 nm
- Angular deviation: < 1 µrad
- Load: 500 g
- Temperature range: 273 K to 353 K
UHV version: 273 K to 393 K - Lowest pressure: 10–7 mbar
UHV version: 2 x 10–10 mbar - Substage mounting: 4 x 3.2 mm holes
- Sample mounting: Clip or 2 x M3 holes
- Material: Stainless steel
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
Ordering information:
Kleindiek LT12830 substage versions
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XY substage for electron microscopy
Substage with 30mm travel for electron microscopy. The system includes control electronics, a joypad, PC software, a vacuum flange, a vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
XY substage for electron microscopy with four encoders (two per axis)
Substage with 3 mm travel and featuring two integrated optical positional encoders per axis. The system includes control electronics, joypad, PC software with a three-point alignment tool, vacuum flange, vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
XYZ (3mm) substage for electron microscopy
XYZ (3mm) substage with 30nm travel for electron microscopy. The system includes control electronics, a joypad-, PC software, a vacuum flange, a vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
XYZR substage for electron microscopy
Substage with 30mm travel for electron microscopy. 3 mm travel in Z. Unlimited rotation. The system includes control electronics, a joypad, PC software, a vacuum flange, a vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
substage for electron microscopy
Substage for electron microscopy
Price On Request Read more