Kleindiek LT14030 substage with 30mm travel and 50nm repeatability
Kleindiek LT14030 stages are suited for orthogonal positioning solutions in atmosphere and with SEM/FIB tools. The LT14030 is primarily used in SEM/FIB to enhancethe accuracy and functionality of the standard microscope stage. It is an economical alternative to laser interferometer stages.
It is built specifically for lithography, cell counting and failure analysis applications and contains two positional encoders per axis for automatic yaw errorcompensation.
Applications examples
- High precision stage for SEM & FIB
- eBeam lithography
- CAD navigation
- Memory cell counting
- Tensile measurement
- Particle counting
- Metrology
- Forensic analysis (e.g. GSR)
Brochure download:
Compact and flexible
- Small and practical
- Plug-and-play system with modular components
- Interfacing solutions for most microscopes
- Fast setup and removal
Clear and simple
- Result-oriented operation which leads to increased
throughput - Intuitive control interfaces, user-friendly software
and API support - User-friendly and easy to learn
- Compact, stand-alone electronics
- Pioneering cabling technology with compact
vacuum feedthrough
Robust and stable
- Compact construction delivers higher resonance
frequencies - Excellent stability
- Virtually insusceptible to vibrations
- Reliable operation (one year endurance test)
- Fast pre-positioning by hand
- Functions in extreme working environments
Fast and more precise
- No backlash or reversal play
- Sub-nanometer step size (< 0.02nm)
- Coarse and fine displacement in one drive
- High operating velocity (up to 1mm/sec)
Low drift (1nm/min)
- Length 141 mm
- Width 133 mm
- Height 21 mm
- Weight 420 g
- Travel XY 30 mm
- Speed up to 1 mm/s
- Smallest step size < 0.02 nmReproducibility 100 nm
- Measurement resolution 50 nm
- Angular deviation < 10 μrad
- Load 500 g
- Temperature range 273 K to 353 K
- Lowest pressure 10-7 mbar
- Substage mounting 3 × 3.2 mm holes
- During operation, the stage will heat up to
approx. 55°C
Optional features
- Z drive with 5 mm travel, 0.02 nm step size
- Laser inter ferometric measurement system
for X and Y - Laser inter ferometric measurement system
avoids stage heat up during operation - Basic version without encoders also available
Ordering information:
Kleindiek LT14030 substage versions
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LT-14030 XY substage for electron microscopy with four encoders (two per axis)
Substage with 30 mm travel and featuring two integrated optical positional encoders per axis. The system includes control electronics, joypad, PC software with a three-point alignment tool, vacuum flange, vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
LT-14030 XY substage for electron microscopy
Substage with 30mm travel for electron microscopy. The system includes control electronics, a joypad, PC software, a vacuum flange, a vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
LT-14030 XYZ (3mm) substage for electron microscopy
XYZ (3mm) substage with 30nm travel for electron microscopy. The system includes control electronics, a joypad-, PC software, a vacuum flange, a vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
LT-14030 XY substage for electron microscopy with four encoders (two per axis) and interferometers
Substage with 30mm travel and featuring two integrated optical positional encoders per axis and interferometers. The system includes control electronics, a joypad, PC software with a three-point alignment tool, a vacuum flange, a vacuum feedthrough operator’s handbook.
Price On Request £0.00 Add to basket