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Kleindiek LT6620 Substage with 20mm travel

Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.

The Kleindiek LT6620 substage is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is designed for large-range high-precision applications in extreme environments.

The range of substages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.

It is not fitted with positional encoders and is thus the economical alternative to the LT6820 substage for applications where repeatability or automization is not required.

Compact and flexible

  • Small and practical
  • Plug-and-play system with modular components
  • Interfacing solutions for most microscopes
  • Fast setup and removal

Clear and simple

  • Result-oriented operation and increased throughput
  • Intuitive control interfaces and software
  • User-friendly and easy to learn
  • Compact, stand-alone electronics with PC interface
  • Pioneering cabling technology

Robust and stable

  • Compact construction delivers higher resonance frequencies
  • Excellent stability
  • Low drift (1 nm/min)
  • Reliable operation (one year endurance test)
  • Virtually insusceptible to vibrations
  • Fast pre-positioning by hand

Fast and precise

  • No backlash or reversal play
  • Sub-nanometer resolution (0.25 nm)
  • Integrated coarse and fine displacement in one drive
  • High operating velocity (up to 10 mm/sec)
  • Smooth motion
  • Length: 66 mm
  • Width: 66 mm
  • Height: XY = 26 mm, XYZ = 50 mm + 15 mm travel
  • Weight: XY = 200 g, XYZ = 270 g
  • Travel: XY = 20 mm, Z = 15 mm
  • Speed: up to 2 mm/s
  • Resolution: < 0.05 nm
  • Angular deviation (unidirectional): < 10 µrad
  • Load: 500 g
  • Lift: 200 g
  • Temperature range: 273 K to 353 K
    UHV version: 273 K to 393 K
    Low temp. version: 77 K to 393 K
  • Lowest pressure: 10–7 mbar
    UHV version: 2 x 10–10 mbar
  • Substage mounting: 4 x 3.2 mm holes
  • Sample mounting: 4 x M3 holes
  • Material: Stainless steel

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.

Ordering information:

Kleindiek LT6620 substage versions