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Kleindiek SFLT10 Super flat substage with 10mm travel

The Kleindiek SFLT10 super flat substage is fitted with next generation piezo technology. Its primary use is in SEM/FIB, coupled with the Prober Shuttle, where it provides smooth and precise two- or three-dimensional movement of the sample. It’s extremely low profile makes it ideal for other uses in tight spots.

Compact and flexible

  • Small and practical
  • Plug-and-play system with modular components
  • Interfacing solutions for most microscopes
  • Fast setup and removal

Clear and simple

  • Result-oriented operation and increased throughput
  • Intuitive control interfaces and software
  • User-friendly and easy to learn
  • Compact, stand-alone electronics with PC interface
  • Pioneering cabling technology

Robust and stable

  • Compact construction delivers higher resonance frequencies
  • Excellent stability
  • Low drift (1 nm/min)
  • Reliable operation (one year endurance test)
  • Virtually insusceptible to vibrations
  • Fast pre-positioning by hand

Fast and precise

  • No backlash or reversal play
  • Sub-nanometer resolution (0.25 nm)
  • Integrated coarse and fine displacement in one drive
  • High operating velocity (up to 10 mm/sec)
  • Smooth motion
    • Length: 33 mm
    • Width: 33 mm
    • Height: 3.5 mm
    • Travel: 10 mm
    • Speed: up to 1 mm/s
    • Resolution: < 0.05 nm
    • Temperature range: 273 K to 353 K
    • Lowest pressure: 10–7 mbar
    • Substage mounting: 4 x M2 holes
    • Sample mounting: Stub
    • Material: Stainless steel

    All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.

Ordering information:

Kleindiek SFLT3310 super flat substage versions

Please contact us for further information and pricing on this substage.