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Palladium coated silicon wafer and microscope slide

Palladium coated substrates are available as a Ø 4”/100mm silicon wafer and a microscope slide, coated with 100nm of pure palladium (99.95%). Palladium has a high hydrogen adsorption capacity which makes it an excellent material for hydrogen sensing and storage applications. Other applications include medical instrumentation, nanotechnology dentistry, thin film research, electrical contacts and jewellery. An adhesion layer of titanium is applied between the substrate and the palladium coating. Both the titanium and palladium coatings are deposited by a dedicated high vacuum deposition system using an electron beam source. The palladium coating is not atomically flat and there are height differences in the nanometre range. For protection, wafers are packed in wafer carrying trays and slides in slide mailers.


Specifications of Nano-Tec palladium coated silicon wafer and microscope slide

Palladium coating

100 nm Pd (99.95% purity)

Titanium adhesion film

5 nm Ti (99,99% purity)

Surface roughness

Several nanometres


Silicon wafer

Microscope slide


Ø 4” / 100 mm

75 x 25 mm


525 µm (+/- 20 µm


Material type

P (boron) –  <100> – 1-30 Ohm/cm

Borofloat 33 – borosilicate glass

Ordering information: