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Silver coated silicon wafers

Nano-Tec silver coated silicon wafers are useful for applications such as thin film research, AFM / SPM, nanotechnology, reflectometry and optical applications. The silicon wafers are coated with pure silver over an adhesion layer of Ti. Both Ti and Ag are deposited in a dedicated high vacuum deposition system with electron beam (EB) evaporation sources. The silver coating is not atomically flat – there are height differences in the nm range.
The available silver coating thicknesses are: 10 nm, 50 nm, 100 nm and 500 nm. Available in three silicon wafer sizes: Ø2”/51mm, 3”/76mm and Ø4”/100mm). The Nano-Tec silver coated wafers are individually packed in wafer carrier trays for protection.


Specifications of Nano-Tec silver coater silicon wafers

Silver coating

Coating film Ag, 99.99% purity

10 nm

50 nm



Adhesion film Ti, 99.98% purity

2 nm

5 nm

5 nm

7.5 nm

Surface roughness

Several nm


Si wafer substrate

Si substrate orientation


Si wafer type  

P (Boron) with one primary flat


1-30 Ohm/cm

Si wafer size

Ø 2”/51 mm



Si wafer thickness

275µm (+/- 25µm)

381µm (+/- 25µm)

525µm (+/- 20µm)


=< 20µm

=< 20µm

=< 20µm

Primary flat

15.9 +/- 1.65mm

22.2 +/- 3.17mm



Ordering information:

Silicon wafers with 10nm of silver coating

Silicon wafers with 50nm of silver coating

Silicon wafers with 100nm of silver coating

Silicon wafers with 500nm of silver coating