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ACT anti-curtaining table
Substage for reducing curtaining artefacts in FIB milling applications. The system includes: anti-curtaining table, eucentric 4-axis substage with 10 mm travel in X, 3 mm travel in Z, unlimited travel in R. Mounted on a tilting platform. The tilting platform allows ±90° tilt and is equipped with an encoder with 0.2° resolution. The system includes control electronics, a joypad, PC software, a vacuum flange, a vacuum feedthrough and an operator’s handbook.