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Eucentric 5-axis substage with encoded rotation axis
Substage with 10mm travel in X and Y, 3 mm travel in Z, unlimited travel in rotation, mounted on a tilting platform. Thetilting platform allows ±90° tilt. The tilt and rotation axes are equipped with encoders providing 0.2° resolution. The system includes control electronics, a joypad, PC software, a vacuum flange, a vacuum feedthrough and an operator’shandbook.