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EM-Tec wafer holders for SEM

EM-Tec wafer holders are specially designed to hold semi-conductor wafers in sizes of 51mm, 76mm, 100mm, 150mm and 200mm diameter (2 inch, 3 inch, 4 inch, 6 inch and 8 inch). They are compatible with wafers with either a flat or with a notch. The unique locking slide is adjustable to cope with non-standard wafers. Made from vacuum compatible aluminium and self-lubricating brass.

Unique features of EM-Tec wafer holders:

  1. Low profile, weight balanced support disc
  2. Square cut-outs for wafer tweezers
  3. Adjustable spring tension
  4. Adjustable for non-standard wafers
  5. Self-lubricating locking slide
  6. Compatible with either wafers with a notch or wafers with a flat
  7. Compatible with EM-Tec stage adaptors for all SEM platforms

Available with:

  • Standard pin to fit on SEMs which use standard pins: ThermoFsher/FEI, Philips, Zeiss, LEO, Leica, Tescan,  Cambridge Instruments, CamScan, SEMs.
  • M4 threaded hole; compatible with Hitachi SEMs, FE-SEMs and table top SEMs and with the EM-Tec versatile SEM stage adaptors
  • Ø14mm JEOL stub compatible with JEOL and EM-Tec stage adaptors with a Ø14mm connection

Please note: When using the larger wafer holders (6in / 150mm and above) we would recommend the M4 version combined with a stage adaptor for your make and model of SEM/FIB. The stage adaptor easily screws into the base of the wafer holder and ensures maximum stability when in use. Please see our wide range of stage adaptors.

Capacity and dimensions for the  EM-Tec wafer holders:

Product #

Type

Wafer sizes

Dimensions w/o pin

Securing methode

SEM stage comp.

12-000282

W2

51mm / 2”

Ø76x18mm

Springloaded slide

Standard 3.2mm pin

12-000382

W2

51mm / 2”

Ø76x18mm

Springloaded slide

M4 thread

12-000682

W2

51mm / 2”

Ø76x18mm

Springloaded slide

Ø14mm JEOL stub

12-000293

W3

76mm / 3”

Ø76x18mm

Springloaded slide

Standard 3.2mm pin

12-000393

W3

76mm / 3”

Ø76x18mm

Springloaded slide

M4 thread

12-000693

W3

76mm / 3”

Ø76x18mm

Springloaded slide

Ø14mm JEOL stub

12-000284

W4

100mm / 4”

Ø106x16mm

Springloaded slide

Standard 3.2mm pin

12-000384

W4

100mm / 4”

Ø106x16mm

Springloaded slide

M4 thread

12-000684

W4

100mm / 4”

Ø106x16mm

Springloaded slide

Ø14mm JEOL stub

12-000286

W6

150/mm / 6”

Ø156x16mm

Springloaded slide

Standard 3.2mm pin

12-000386

W6

150mm / 6”

Ø156x16mm

Springloaded slide

M4 thread

12-000686

W6

150mm / 6”

Ø156x16mm

Springloaded slide

Ø14mm JEOL stub

12-000288

W8

200mm / 8”

Ø206x16mm

Springloaded slide

Standard 3.2mm pin

12-000388

W8

200mm / 8”

Ø206x16mm

Springloaded slide

M4 thread

12-000688

W8

200mm / 8”

Ø206x16mm

Springloaded slide

Ø14mm JEOL stub

 

Ordering information: