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Tergeo-EM tabletop plasma cleaner
Tergeo-EM tabletop plasma cleaner with Direct/immersion and downstream/remote plasma sources in one system. Plasma emission sensor for quantitative plasma emission intensity measurement.
75W 13.56MHz high frequency RF supply.
Tergeo-EM tabletop plasma cleaner, consisting of:
- Thick wall quartz tube (5mm thick) with inner diameter of 110mm and outer diameter of 120mm and with a depth of 280mm.
- Direct/immersion and downstream/remote plasma sources in one system.
- Plasma emission sensor for quantitative plasma emission intensity measurement.
- 75W 13.56MHz high frequency RF supply, adjustable from 1 to 75W at 1w intervals.
- Auto-tuning of the immersion plasma source and fixed matching of the downstream plasma source.
- CW and pulsed plasma. Duty ratio adjustable from 1/255 to 255/255 (CW).
- 7-inch resistive LCD industrial touchscreen controller.
- Fully automatic operation with 20 recipe support.
- Job sequence mode operation for executing three cleaning steps.
- Two mass flow controller (MFC) regulated gas inputs (which can support up to three MFC upon request).
- Corrosion resistant Pirani pressure sensor.
- Venting/purging port with electronic solenoid valve (1/4” Swagelock compression fitting).
- Pumping port with electronic shutoff valve and standard NW/KF25 vacuum port.
- Quartz internal sample holder with holes for standard SEM pin stubs.
- Tergeo-EM stainless steel front cap.
- Two TEM rod adaptors which can be configured as the combination of any of the TEM manufacturers.
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