Tergeo-EM tabletop plasma cleaner

Tergeo-EM tabletop plasma cleaner with Direct/immersion and downstream/remote plasma sources in one system. Plasma emission sensor for quantitative plasma emission intensity measurement.
75W 13.56MHz high frequency RF supply.

Tergeo-EM tabletop plasma cleaner, consisting of:

• Thick wall quartz tube (5mm thick) with inner diameter of 110mm and outer diameter of 120mm and with a depth of 280mm.
• Direct/immersion and downstream/remote plasma sources in one system.
• Plasma emission sensor for quantitative plasma emission intensity measurement.
• 75W 13.56MHz high frequency RF supply, adjustable from 1 to 75W at 1w intervals.
• Auto-tuning of the immersion plasma source and fixed matching of the downstream plasma source.
• CW and pulsed plasma. Duty ratio adjustable from 1/255 to 255/255 (CW).
• 7-inch resistive LCD industrial touchscreen controller.
• Fully automatic operation with 20 recipe support.
• Job sequence mode operation for executing three cleaning steps.
• Two mass flow controller (MFC) regulated gas inputs (which can support up to three MFC upon request).
• Corrosion resistant Pirani pressure sensor.
• Venting/purging port with electronic solenoid valve (1/4” Swagelock compression fitting).
• Pumping port with electronic shutoff valve and standard NW/KF25 vacuum port.
• Quartz internal sample holder with holes for standard SEM pin stubs.
• Tergeo-EM stainless steel front cap.
• Two TEM rod adaptors which can be configured as the combination of any of the TEM manufacturers.