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Tergeo-EM tabletop plasma cleaner

SKU: PIE-TE100

Tergeo-EM tabletop plasma cleaner with Direct/immersion and downstream/remote plasma sources in one system. Plasma emission sensor for quantitative plasma emission intensity measurement.
75W 13.56MHz high frequency RF supply.

Tergeo-EM tabletop plasma cleaner, consisting of:

  • Thick wall quartz tube (5mm thick) with inner diameter of 110mm and outer diameter of 120mm and with a depth of 280mm.
  • Direct/immersion and downstream/remote plasma sources in one system.
  • Plasma emission sensor for quantitative plasma emission intensity measurement.
  • 75W 13.56MHz high frequency RF supply, adjustable from 1 to 75W at 1w intervals.
  • Auto-tuning of the immersion plasma source and fixed matching of the downstream plasma source.
  • CW and pulsed plasma. Duty ratio adjustable from 1/255 to 255/255 (CW).
  • 7-inch resistive LCD industrial touchscreen controller.
  • Fully automatic operation with 20 recipe support.
  • Job sequence mode operation for executing three cleaning steps.
  • Two mass flow controller (MFC) regulated gas inputs (which can support up to three MFC upon request).
  • Corrosion resistant Pirani pressure sensor.
  • Venting/purging port with electronic solenoid valve (1/4” Swagelock compression fitting).
  • Pumping port with electronic shutoff valve and standard NW/KF25 vacuum port.
  • Quartz internal sample holder with holes for standard SEM pin stubs.
  • Tergeo-EM stainless steel front cap.
  • Two TEM rod adaptors which can be configured as the combination of any of the TEM manufacturers.