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Kleindiek LT6820 Substage with 20mm travel and 100nm repeatability

The Kleindiek LT6820 is primarily used in SEM amd FIB-SEM to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.

The range of substages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.

It is designed specifically for lithography, cell counting and failure analysis applications and is fitted with positional encoders allowing 100 nm repeatability on the X and Y axes.

Brochure download:

LT6820 substage

Compact and flexible

  • Small and practical
  • Plug-and-play system with modular components
  • Interfacing solutions for most microscopes
  • Fast setup and removal

Clear and simple

  • Result-oriented operation and increased throughput
  • Intuitive control interfaces and software
  • User-friendly and easy to learn
  • Compact, stand-alone electronics with PC interface
  • Pioneering cabling technology

Robust and stable

  • Compact construction delivers higher resonance frequencies
  • Excellent stability
  • Low drift (1 nm/min)
  • Reliable operation (one year endurance test)
  • Virtually insusceptible to vibrations
  • Fast pre-positioning by hand

Fast and precise

  • No backlash or reversal play
  • Sub-nanometer resolution (0.25 nm)
  • Integrated coarse and fine displacement in one drive
  • High operating velocity (up to 10 mm/sec)
  • Smooth motion
      • Length: 68 mm
      • Width: 68 mm
      • Height: XY = 26 mm, XYZ = 50 mm + 15 mm travel
      • Weight: XY = 200 g, XYZ = 270 g
      • Travel: XY = 20 mm, Z = 15 mm
      • Speed: up to 2 mm/s
      • Resolution: < 0.05 nm
      • Encoder repeatability: 100 nm*
      • Angular deviation (undirectional): < 10 µrad
      • Load: 500 g
      • Lift: 200 g
      • Temperature range: 273 K to 353 K
        UHV version: 273 K to 393 K
      • Lowest pressure: 10–7 mbar
        UHV version: 2 x 10–10 mbar
      • Substage mounting: 4 x 3.2 mm holes
      • Sample mounting: 4 x M3 holes
      • Material: Stainless steel

      * Repeatability depends on the working distance from the encoder due to the angular deviation of the substage.

      All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.

Ordering information:

Kleindiek LT6820 substage versions