Kleindiek LT6820 Substage with 20mm travel and 100nm repeatability
The Kleindiek LT6820 is primarily used in SEM amd FIB-SEM to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.
The range of substages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.
It is designed specifically for lithography, cell counting and failure analysis applications and is fitted with positional encoders allowing 100 nm repeatability on the X and Y axes.
Brochure download:
Compact and flexible
- Small and practical
- Plug-and-play system with modular components
- Interfacing solutions for most microscopes
- Fast setup and removal
Clear and simple
- Result-oriented operation and increased throughput
- Intuitive control interfaces and software
- User-friendly and easy to learn
- Compact, stand-alone electronics with PC interface
- Pioneering cabling technology
Robust and stable
- Compact construction delivers higher resonance frequencies
- Excellent stability
- Low drift (1 nm/min)
- Reliable operation (one year endurance test)
- Virtually insusceptible to vibrations
- Fast pre-positioning by hand
Fast and precise
- No backlash or reversal play
- Sub-nanometer resolution (0.25 nm)
- Integrated coarse and fine displacement in one drive
- High operating velocity (up to 10 mm/sec)
- Smooth motion
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- Length: 68 mm
- Width: 68 mm
- Height: XY = 26 mm, XYZ = 50 mm + 15 mm travel
- Weight: XY = 200 g, XYZ = 270 g
- Travel: XY = 20 mm, Z = 15 mm
- Speed: up to 2 mm/s
- Resolution: < 0.05 nm
- Encoder repeatability: 100 nm*
- Angular deviation (undirectional): < 10 µrad
- Load: 500 g
- Lift: 200 g
- Temperature range: 273 K to 353 K
UHV version: 273 K to 393 K - Lowest pressure: 10–7 mbar
UHV version: 2 x 10–10 mbar - Substage mounting: 4 x 3.2 mm holes
- Sample mounting: 4 x M3 holes
- Material: Stainless steel
* Repeatability depends on the working distance from the encoder due to the angular deviation of the substage.
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
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Ordering information:
Kleindiek LT6820 substage versions
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XY substage for electron microscopy with encoders on X & Y
Substage with 20mm travel for electron microscopy featuring integrated optical positional encoders. The system includes control electronics, a joypad, PC software with a three-point alignment tool, a vacuum flange, a vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
XY substage for UHV with encoders on X & Y
XY substage for UHV with encoders on X and Y, substage with 20mm travel for UHV applications and featuring integrated optical positional encoders. The system includes control electronics, a joypad, PC software with a three-point alignment tool and an operator’s handbook. Vacuum flange and vacuum feedthrough(s) to be supplied by the customer.
Price On Request £0.00 Add to basket -
XYZ substage for electron microscopy with encoders on X & Y
Substage with 20 mm travel for electron microscopy and featuring integrated optical positional encoders. The system includes control electronics, a joypad, PC software with a three-point alignment tool, a vacuum flange, a vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
XYZ substage for UHV with encoders on X & Y
XYZ substage for UHV applications with encoders on X amd Y, substage with 20mm travel. Featuring integrated optical positional encoders for the X and Y axes. The system includes control electronics, joypad, PC software with a three-point alignment tool and an operator’s handbook. Vacuum flange and vacuum feedthrough(s) to be supplied by the customer.
Price On Request £0.00 Add to basket -
XYZ substage for electron microscopy with encoders on all axes
Substage with 20mm travel for electron microscopy and featuring integrated optical positional encoders. The system includes control electronics, a joypad, PC software with a three-point alignment tool, a vacuum flange, a vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
XYZ substage for UHV with encoders on all axes
XYZ substage for UHV with encoders on all axes. Substage with 20mm travel and featuring integrated optical positional encoders. The system includes control electronics, joypad, PC software with a three-point alignment tool and an operator’s handbook. Vacuum flange and vacuum feedthrough(s) to be supplied by the customer.
Price On Request £0.00 Add to basket -
XYZR substage for electron microscopy with encoders on X & Y
XYZR substage for electron microscopy with encoders on X and Y . Substage with 20mm travel in X and Y, 10mm Z and 360° rotation. The system includes control electronics, joypad, PC software with a three-point alignment tool, vacuum flange, vacuum feedthrough and an operator’s handbook.
Price On Request £0.00 Add to basket -
Substage for electron microscopy with encoders
substage for electron microscopy with encoders
Price On Request Read more -
Z travel extension to 22mm
Special modification to Z axis to provide 22mm of travel.
Price On Request £0.00 Add to basket