Kleindiek LT6820 Substage with 20mm travel and 100nm repeatability

The Kleindiek LT6820 is primarily used in SEM amd FIB-SEM to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.

The range of substages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.

It is designed specifically for lithography, cell counting and failure analysis applications and is fitted with positional encoders allowing 100 nm repeatability on the X and Y axes.

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LT6820 substage

Compact and flexible

Small and practical
Plug-and-play system with modular components
Interfacing solutions for most microscopes
Fast setup and removal

Clear and simple

Result-oriented operation and increased throughput
Intuitive control interfaces and software
User-friendly and easy to learn
Compact, stand-alone electronics with PC interface
Pioneering cabling technology

Robust and stable

Compact construction delivers higher resonance frequencies
Excellent stability
Low drift (1 nm/min)
Reliable operation (one year endurance test)
Virtually insusceptible to vibrations
Fast pre-positioning by hand

Fast and precise

No backlash or reversal play
Sub-nanometer resolution (0.25 nm)
Integrated coarse and fine displacement in one drive
High operating velocity (up to 10 mm/sec)
Smooth motion

- - Length: 68 mm
  - Width: 68 mm
  - Height: XY = 26 mm, XYZ = 50 mm + 15 mm travel
  - Weight: XY = 200 g, XYZ = 270 g
  - Travel: XY = 20 mm, Z = 15 mm
  - Speed: up to 2 mm/s
  - Resolution: < 0.05 nm
  - Encoder repeatability: 100 nm*
  - Angular deviation (undirectional): < 10 µrad
  - Load: 500 g
  - Lift: 200 g
  - Temperature range: 273 K to 353 K
    UHV version: 273 K to 393 K
  - Lowest pressure: 10^–7 mbar
    UHV version: 2 x 10^–10 mbar
  - Substage mounting: 4 x 3.2 mm holes
  - Sample mounting: 4 x M3 holes
  - Material: Stainless steel
  * Repeatability depends on the working distance from the encoder due to the angular deviation of the substage.
  
  All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.